Applied Physics A

, Volume 114, Issue 1, pp 33–43 | Cite as

Confined micro-explosion induced by ultrashort laser pulse at SiO2/Si interface

  • Ludovic Rapp
  • Bianca Haberl
  • Jodie E. Bradby
  • Eugene G. Gamaly
  • Jim S. Williams
  • Andrei V. Rode
Invited paper
First Online:
Received:
Accepted:

Abstract

Ultrashort laser pulses tightly focused inside a transparent material present an example of laser interaction with matter where all the laser-affected material remains inside the bulk, thus the mass is conserved. In this paper, we present the case where the high intensity of a laser pulse is above the threshold for optical breakdown, and the material is ionised in the focal area. We consider in detail a special case where a micro-explosion is formed at the boundary of a silicon surface buried under a 10-micron-thick oxidised layer, providing the opportunity to affect the silicon crystal by a strong shock wave and creating new material phases from the plasma state. We summarise the main conclusions on ultrafast laser-induced material modifications in confined geometry and discuss the prospects of confined micro-explosion for forming new silicon phases.

Keywords

Shock Wave Focal Spot Electron Number Density Ultrashort Laser Pulse Ionisation Threshold 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Notes

Acknowledgments

This research was supported under Australian Research Council’s Discovery Project funding scheme (project number DP120102980). Partial support to this work by Air Force Office of Scientific Research, USA (FA9550-12-1-0482) is gratefully acknowledged. We also acknowledge the ANFF ACT Node for the access to their FIB system.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  • Ludovic Rapp
    • 1
  • Bianca Haberl
    • 2
  • Jodie E. Bradby
    • 2
  • Eugene G. Gamaly
    • 1
  • Jim S. Williams
    • 2
  • Andrei V. Rode
    • 1
  1. 1.Laser Physics Centre, Research School of Physics and EngineeringThe Australian National UniversityCanberraAustralia
  2. 2.Electronic Materials Engineering, Research School of Physics and EngineeringThe Australian National UniversityCanberraAustralia

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