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Applied Physics A

, Volume 114, Issue 3, pp 965–972 | Cite as

Effect of annealing on structural and optical properties of diamond-like nanocomposite thin films

  • Sukhendu JanaEmail author
  • Sayan Das
  • Debasish De
  • Utpal Gangopadhyay
  • Prajit Ghosh
  • Anup Mondal
Article

Abstract

The annealing effect on structural and optical properties of the Diamond-like Nanocomposite (DLN) thin film deposited on glass substrate by Plasma Assisted Chemical Vapor Deposition (PACVD) method has been investigated. The films were annealed at temperature ranging from 300 to 600 °C, with 100 °C interval for 9 minutes by rapid thermal process (RTP) under vacuum. The structural changes of the annealed films have been studied using Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, Scanning Electron Microscope (SEM), and optical parameters have been determined using transmittance and reflectance spectra in UV-UIS-NIR range. The result shows that the refractive index increases gradually from 1.79 to 2.84 with annealing temperature due to out-diffusion of H by breaking Si–H and C–H bond leads to Si–C bond, i.e. more cross linking structure. In higher temperature range, graphitization also enhanced the refractive index. However, the optical band gap at up to 400 °C initially increases from 3.05 to 3.20 eV and then decreases due to graphitization. The film has a great potential to be used as anti-reflection coating (ARC) on silicon-based solar cell.

Keywords

Refractive Index Increase Annealing Temperature Annealed Film Rapid Thermal Process Band Tail 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgements

The authors most sincerely acknowledge the Department of Science and Technology, Govt. of India for financing support and Meghnad Saha Institute of Technology, Techno India Group, Kolkata, India for infrastructural support. The authors also acknowledge Sutapa Garain, Soma Roy and Sanchita Dutta for technical support.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  • Sukhendu Jana
    • 1
    • 3
    Email author
  • Sayan Das
    • 1
    • 2
  • Debasish De
    • 1
  • Utpal Gangopadhyay
    • 1
  • Prajit Ghosh
    • 1
  • Anup Mondal
    • 2
    • 3
  1. 1.Meghnad Saha Institute of TechnologyKolkataIndia
  2. 2.Dept. of ChemistryBengal Engineering and Science UniversityHowrahIndia
  3. 3.Center of Excellence for Green Energy and Sensor SystemBengal Engineering and Science UniversityHowrahIndia

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