Influence of ion bombardment on growth and properties of PLD created DLC films
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A hybrid PLD system with ion bombardment of films was developed. Growing DLC films were modified during the laser deposition (10 J cm−2) by argon ions with energy in the range from 40 eV to 210 eV and cathode current of 0.15 A and 0.5 A. The content of sp2 “graphitic” and sp3 “diamond” bonds was measured using XPS. Sp3 bonds changed from 60 % to 81 %. We found the highest sp3 content for energy of 40 eV. Hardness (and reduced Young’s modulus) were determined by nanoindentation and reached 49 GPa (277 GPa). Film adhesion was studied using the scratch test and was up to 14 N for titanium substrates. Relations among deposition conditions and measured properties are presented.
KeywordsPulse Laser Deposition Cathode Current Hemispherical Electron Energy Analyzer Room Substrate Temperature Maximum Critical Load
We thank the Institutional research plan AV010100522, grant of the Czech Technical University in Prague SGS12/167/OHK4/2T/17 and SGS12/088/OHK4/1T/17, and the Ministry of Education, Youth and Sports of the Czech Republic for grants COST LD12069.
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