Single- and multi-scan femtosecond laser writing for selective chemical etching of cross section patternable glass micro-channels
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We report on the fabrication of three dimensional micro-fluidic channels in fused silica glass using a combination of femtosecond laser writing and hydrofluoric acid wet etching to flexibly create various cross-sectional profiles of highly uniform shape and smooth vertical walls. The laser power, polarization, focusing depth, scanning angle and scanning speed were systematically studied with single- and multi-scan configurations to assess optimum micro-channel formation including etch rate, surface roughness, and stress-induced crack formation. We introduce the formation of vertical access-ports that extend the buried channel formation to unlimited length without tapering or distortion of the channel cross-sectional shape.
KeywordsPulse Energy Femtosecond Laser Circular Polarization Scanning Speed Etch Rate
Authors express their gratitude to the Natural Sciences and Engineering Research Council of Canada, and the Canadian Institute for Photonic Innovations, a Network of Centres of Excellence, for supporting this work.
- 12.Y. Bellouard, A. Said, M. Dugan, P. Bado, MRS Proceedings (2003), p. 782. Boston Google Scholar