Applied Physics A

, Volume 102, Issue 2, pp 265–269 | Cite as

Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices

  • S. Beke
  • L. Kőrösi
  • K. Sugioka
  • K. Midorikawa
  • I. Dékány
Rapid communication

Abstract

A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped In2O3, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    D. Psaltis, S.R. Quake, C. Yang, Nature 442, 381 (2006) CrossRefADSGoogle Scholar
  2. 2.
    M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, K. Midorikawa, Appl. Phys. A 76, 857 (2003) CrossRefADSGoogle Scholar
  3. 3.
    Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama, Opt. Lett. 28, 55 (2003) CrossRefADSGoogle Scholar
  4. 4.
    Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama, Opt. Lett. 28, 1144 (2003) CrossRefADSGoogle Scholar
  5. 5.
    K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, K. Midorikawa, Appl. Phys. A 78, 815 (2004) ADSGoogle Scholar
  6. 6.
    M. Masuda, K. Sugioka, Y. Cheng, T. Hongo, K. Shihoyama, H. Takai, I. Miyamoto, K. Midorikawa, Appl. Phys. A 78, 1029 (2004) CrossRefADSGoogle Scholar
  7. 7.
    Y. Cheng, K. Sugioka, K. Midorikawa, Opt. Lett. 29, 2007 (2004) CrossRefADSGoogle Scholar
  8. 8.
    K. Sugioka, Y. Cheng, K. Midorikawa, J. Photopolym. Sci. Technol. 17, 397 (2004) CrossRefGoogle Scholar
  9. 9.
    K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81, 1 (2005) CrossRefADSGoogle Scholar
  10. 10.
    Y. Cheng, K. Sugioka, K. Midorikawa, Appl. Surf. Sci. 248, 172 (2005) CrossRefADSGoogle Scholar
  11. 11.
    T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, K. Midorikawa, J. Appl. Phys. 97, 063517 (2005) CrossRefADSGoogle Scholar
  12. 12.
    Y. Cheng, H. Tsai, K. Sugioka, K. Midorikawa, Appl. Phys. A 85, 11 (2006) CrossRefADSGoogle Scholar
  13. 13.
    K. Sugioka, Y. Cheng, K. Midorikawa, F. Takase, H. Takai, Opt. Lett. 31, 208 (2006) CrossRefADSGoogle Scholar
  14. 14.
    M. Eritt, C. May, K. Leo, M. Toerker, C. Radehaus, Thin Solid Films 518, 3042 (2010) CrossRefADSGoogle Scholar
  15. 15.
    J.-M. Liu, P.-Y. Lu, W.-K. Weng, Mater. Sci. Eng. B 85, 209 (2001) CrossRefGoogle Scholar
  16. 16.
    N.R. Armstrong, C. Carter, C. Donley, A. Simmonds, P. Lee, M. Brumbach, B. Kippelen, B. Domercq, S. Yoo, Thin Solid Films 445, 342 (2003) CrossRefADSGoogle Scholar
  17. 17.
    A.B. Chebotareva, G.G. Untila, T.N. Kost, S. Jorgensen, A.G. Ulyashin, Thin Solid Films 515, 8505 (2007) CrossRefADSGoogle Scholar
  18. 18.
    C.G. Granqvist, A. Hultåker, Thin Solid Films 411, 1 (2002) CrossRefADSGoogle Scholar
  19. 19.
    C.R. Zamarreño, M. Hernaez, I. Del Villar, I.R. Matias, F.J. Arregui, Sens. Actuators B, Chem. 146, 414 (2010) CrossRefGoogle Scholar
  20. 20.
    P. Frach, D. Glöß, K. Goedicke, M. Fahland, W.-M. Gnehr, Thin Solid Films 445, 251 (2003) CrossRefADSGoogle Scholar
  21. 21.
    R. Das, K. Adhikary, S. Ray, Appl. Surf. Sci. 253, 6068 (2007) CrossRefADSGoogle Scholar
  22. 22.
    S.-Y. Lien, Thin Solid Films 518, S10 (2010) CrossRefADSGoogle Scholar
  23. 23.
    M. Yamaguchi, A. Ide-Ektessabi, H. Nomura, N. Yasui, Thin Solid Films 115, 447–448 (2004) Google Scholar
  24. 24.
    N. Manavizadeh, F. Akbari Boroumand, E. Asl-Soleimani, F. Raissi, S. Bagherzadeh, A. Khodayari, M. Amin Rasouli, Thin Solid Films 517, 2324 (2009) CrossRefADSGoogle Scholar
  25. 25.
    H. Mbarek, M. Saadoun, B. Bessaïs, Mater. Sci. Eng. C 26, 500 (2006) CrossRefGoogle Scholar
  26. 26.
    T.L. Li, S.L.C. Hsu, Thin Solid Films 518, 6761 (2010) CrossRefADSGoogle Scholar
  27. 27.
    Y.J. Kang, M. Okada, Y. Haruyama, K. Kanda, S. Matsui et al., J. Photopolym. Sci. Technol. 23, 39 (2010) CrossRefGoogle Scholar
  28. 28.
    S. Kundu, P.K. Biswas, Opt. Mater. 31, 429 (2008) CrossRefADSGoogle Scholar
  29. 29.
    E. Celik, U. Aybarc, M.F. Ebeoglugil, I. Birlik, O. Culha, J. Sol-Gel Sci. Technol. 50, 337 (2009) CrossRefGoogle Scholar
  30. 30.
    M.J. Alam, D.C. Cameron, Thin Solid Films 455, 377–378 (2000) Google Scholar
  31. 31.
    T.M. Hammad, Phys. Status Solidi A 206, 2128 (2009) CrossRefADSGoogle Scholar
  32. 32.
    K. Sugioka, Y. Hanada, K. Midorikawa, Laser Photonics Rev. 4, 386 (2010) CrossRefGoogle Scholar

Copyright information

© Springer-Verlag 2011

Authors and Affiliations

  • S. Beke
    • 1
  • L. Kőrösi
    • 2
  • K. Sugioka
    • 1
  • K. Midorikawa
    • 1
  • I. Dékány
    • 2
  1. 1.Laser Technology LaboratoryRIKEN—Advanced Science InstituteSaitamaJapan
  2. 2.Supramolecular and Nanostructured Materials Research Group of the Hungarian Academy of SciencesUniversity of SzegedSzegedHungary

Personalised recommendations