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Applied Physics A

, Volume 102, Issue 1, pp 69–77 | Cite as

Introduction of Zr in nanometric periodic Mg/Co multilayers

  • K. Le Guen
  • M.-H. Hu
  • J.-M. André
  • P. Jonnard
  • S. K. Zhou
  • H. C. Li
  • J. T. Zhu
  • Z. S. Wang
  • N. Mahne
  • A. Giglia
  • S. Nannarone
Rapid communication

Abstract

We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, and then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements, respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45° of grazing incidence and reaches 51.3% upon annealing at 200°C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.

Keywords

Bragg Peak Grazing Incidence Grazing Angle Wide Spectral Range Multilayer Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • K. Le Guen
    • 1
  • M.-H. Hu
    • 1
  • J.-M. André
    • 1
  • P. Jonnard
    • 1
  • S. K. Zhou
    • 2
  • H. C. Li
    • 2
  • J. T. Zhu
    • 2
  • Z. S. Wang
    • 2
  • N. Mahne
    • 3
  • A. Giglia
    • 3
  • S. Nannarone
    • 3
  1. 1.Laboratoire de Chimie Physique—Matière RayonnementUPMC Univ Paris 06, CNRS UMR 7614Paris cedex 05France
  2. 2.Institute of Precision Optical Engineering, Department of PhysicsTongji UniversityShanghaiP.R. China
  3. 3.Istituto Officina dei Materiali IOM-CNR Laboratorio TASCTriesteItaly

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