Several designs of sub-wavelength grating mirrors adapted to mid-infrared operation are reported with several percents of tolerance for the grating fabrication. These designs have been automatically optimized by the use of a genetic-based algorithm to maximize a quality factor defined to meet the requirements of a VCSEL cavity mirror. These mirrors are devoted to integration in VCSEL operating near λ=2.3 μm, with a large bandwidth, very high reflectivity coefficient for transverse magnetic mode only, polarization selectivity and a thickness as low as 2 μm.
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Chevallier, C., Fressengeas, N., Genty, F. et al. Optimized sub-wavelength grating mirror design for mid-infrared wavelength range. Appl. Phys. A 103, 1139–1144 (2011). https://doi.org/10.1007/s00339-010-6059-4
- Large Bandwidth
- Transverse Magnetic Mode
- Sublayer Thickness
- Grating Thickness