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Applied Physics A

, Volume 102, Issue 1, pp 205–211 | Cite as

Electron beam nanofabrication of ferromagnetic nanostructures in TEM

  • T. Gnanavel
  • M. A. Mat Yajid
  • Z. Saghi
  • Y. Peng
  • B. J. Inkson
  • M. R. J. Gibbs
  • G. Möbus
Article

Abstract

Electron beam (e-beam) fabrication of nanostructures by transmission electron microscopy (TEM) is rapidly developing into a top-down nanofabrication method for the sub-5 nm fabrication of structures that cannot usually be realised using resist based lithographic techniques or by the focused ion beam patterning methods. We describe the usage of a variety of e-beam shapes, including point and elliptical line focus, as well as a comparison of LaB6 and field-emission guns (FEGs), to achieve versatile sculpting of nanodot arrays, nanobridges and nanotips. We operate our patterning on free-standing nickel (Ni) thin film laterally connected to a silicon (Si) substrate as well as to free-standing Ni nanotips, where we achieve a novel three-dimensional (3D) nano-sculpting methodology.

Keywords

Hole Drilling Astigmatism Hole Array Transmission Electron Microscopy Specimen Line Focus 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • T. Gnanavel
    • 1
  • M. A. Mat Yajid
    • 1
  • Z. Saghi
    • 1
  • Y. Peng
    • 1
  • B. J. Inkson
    • 1
  • M. R. J. Gibbs
    • 1
  • G. Möbus
    • 1
  1. 1.Department of Engineering MaterialsUniversity of SheffieldSheffieldUK

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