Advertisement

Applied Physics A

, Volume 100, Issue 1, pp 171–175 | Cite as

Fabrication of desired three-dimensional structures by holographic assembly technique

  • Ngoc Diep LaiEmail author
  • Tsao Shih Zheng
  • Danh Bich Do
  • Jian Hung Lin
  • Chia Chen Hsu
Article

Abstract

We demonstrate a novel technique to fabricate desired three-dimensional (3D) periodic structures by holographically assembling multiple one-dimensional (1D) or multiple two-dimensional (2D) structures. Thanks to the high-absorption effect of the used material, we fabricated for each time, by employing a two-beam interference technique, a 1D or a 2D structure with very limited film thickness. By using the same sample and repeating the same fabrication process, i.e., (i) spin coating, (ii) exposure, and (iii) post-exposure bake, we created, layer-by-layer, a 3D structure as desired, without the limitation of the number of layers. This technique allows rapid fabrication of very large and thick 3D photonic crystal template with variable period, flexible design, low cost, and possible introduction of arbitrary defects inside a 3D structure.

Keywords

Photonic Crystal Successive Layer Slow Axis Rapid Fabrication Holographic Lithography 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J.D. Joannopoulos, R.D. Meade, J.N. Winn, Photonic Crystals (Princeton University Press, Princeton, 1995) zbMATHGoogle Scholar
  2. 2.
    E. Ozbay, A. Abeyta, G. Tuttle, M. Tringides, R. Biswas, C.T. Chan, C.M. Soukoulis, K.M. Ho, Phys. Rev. 50, 1945–1948 (1994) CrossRefADSGoogle Scholar
  3. 3.
    S.Y. Lin, J.G. Fleming, D.L. Hetherington, B.K. Smith, R. Biswas, K.M. Ho, M.M. Sigalas, W. Zubrzycki, S.R. Kurtz, J. Bur, Nature 394, 251–253 (1998) CrossRefADSGoogle Scholar
  4. 4.
    S. Noda, K. Tomoda, N. Yamamoto, A. Chutinan, Sciences 289, 604–606 (2000) Google Scholar
  5. 5.
    K. Aokia, H.T. Miyazaki, H. Hirayama, K. Inoshita, T. Baba, N. Shinya, Y. Aoyagi, Appl. Phys. Lett. 81, 3122–3124 (2002) CrossRefADSGoogle Scholar
  6. 6.
    M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, C.M. Soukoulis, Nat. Matter. 3, 444–447 (2004) CrossRefADSGoogle Scholar
  7. 7.
    V. Mizeikis, K.K. Seet, S. Juodkazis, H. Misawa, Opt. Lett. 29, 2061–2063 (2004) CrossRefADSGoogle Scholar
  8. 8.
    J. Serbin, A. Ovsianikov, B. Chichkov, Opt. Express 12, 5221–5228 (2004) CrossRefADSGoogle Scholar
  9. 9.
    J. Li, B. Jia, M. Gu, Opt. Express 16, 20073–20080 (2008) CrossRefADSGoogle Scholar
  10. 10.
    M. Campbell, D.N. Sharp, M.T. Harrison, R.G. Denning, A.J. Turberfield, Nature 404, 53–56 (2000) CrossRefADSGoogle Scholar
  11. 11.
    S. Shoji, H.-B. Sun, S. Kawata, Appl. Phys. Lett. 83, 608–670 (2003) CrossRefADSGoogle Scholar
  12. 12.
    N.D. Lai, W.P. Liang, J.H. Lin, C.C. Hsu, C.H. Lin, Opt. Express 13, 9605–9610 (2005) CrossRefADSGoogle Scholar
  13. 13.
    R.C. Rumpf, E.G. Johnson, J. Opt. Soc. Am. A 21, 1703–1713 (2004) CrossRefADSGoogle Scholar
  14. 14.
    P. Yao, G.J. Schneider, B. Miao, J. Murakowski, D.W. Prather, E.D. Wetzel, D.J. O’Brien, Appl. Phys. Lett. 85, 3920–3922 (2004) CrossRefADSGoogle Scholar
  15. 15.
    P. Yao, G.J. Schneider, D.W. Prather, E.D. Wetzel, D.J. O’Brien, Opt. Express 13, 2370–2376 (2005) CrossRefADSGoogle Scholar
  16. 16.
    J.W. Menezes, L. Cescato, E.J. de Carvalho, E.S. Braga, Opt. Express 14, 8578–8583 (2006) CrossRefADSGoogle Scholar
  17. 17.
    B. Gralak, M. de Dood, G. Tayeb, S. Enoch, D. Maystre, Phys. Rev. E 67, 066601 (2003) CrossRefADSGoogle Scholar
  18. 18.
    A. Feigel, B. Sfez, Appl. Opt. 43, 793–795 (2004) CrossRefADSGoogle Scholar
  19. 19.
    M. Maldovan, E.L. Thomas, C.W. Carter, Appl. Phys. Lett. 84, 362–364 (2004) CrossRefADSGoogle Scholar
  20. 20.
    Y. Lin, P.R. Herman, J. Appl. Phys. 98, 063104 (2005) CrossRefADSGoogle Scholar
  21. 21.
    H. Liu, J. Yao, D. Xu, P. Wang, Opt. Express 15, 695–703 (2007) CrossRefADSGoogle Scholar
  22. 22.
    S. Enoch, J.-J. Simon, L. Escoubas, Z. Elalmy, F. Lemarquis, P. Torchio, G. Albrand, Appl. Phys. Lett. 86, 261101 (2005) CrossRefADSGoogle Scholar
  23. 23.
    J.C.W. Lee, C.T. Chan, Appl. Phys. Lett. 90, 051912 (2007) CrossRefADSGoogle Scholar
  24. 24.
    N.D. Lai, J.H. Lin, W.P. Liang, C.C. Hsu, C.H. Lin, Appl. Opt. 45, 5777–5782 (2006) CrossRefADSGoogle Scholar

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • Ngoc Diep Lai
    • 1
    Email author
  • Tsao Shih Zheng
    • 2
  • Danh Bich Do
    • 2
    • 3
  • Jian Hung Lin
    • 2
  • Chia Chen Hsu
    • 2
    • 4
    • 5
  1. 1.Laboratoire de Photonique Quantique et MoléculaireEcole Normale Supérieure de Cachan, UMR CNRS 8537CachanFrance
  2. 2.Department of PhysicsNational Chung Cheng UniversityMing HsiungTaiwan
  3. 3.Department of PhysicsHanoi National University of EducationHanoiVietnam
  4. 4.Graduate Institute of Opto-MechatronicsNational Chung Cheng UniversityMing HsiungTaiwan
  5. 5.Department of PhotonicsNational Sun Yat-Sen UniversityKaohsiungTaiwan

Personalised recommendations