Applied Physics A

, Volume 99, Issue 1, pp 271–278 | Cite as

Effects of reflecting layers on resonance characteristics of a solidly mounted resonator with ¼ λ mode configuration

  • Ching-Liang Wei
  • Ying-Chung Chen
  • Sin-Ren Li
  • Chien-Chuan Cheng
  • Kuo-Sheng Kao
  • Chung-Jen Chung
Article
First Online:
Received:
Accepted:

Abstract

The solidly mounted resonator (SMR) is composed of a piezoelectric thin film sandwiched between two electrodes and a Bragg reflector that comprises alternating high and low acoustic impedance with a thickness of a quarter wavelength. In this study, the combination Mo/SiO2 is chosen as high/low acoustic impedance materials to form a Bragg reflector; aluminum nitride (AlN) is utilized as the piezoelectric layer. The purpose of this study is to investigate the resonance characteristics of solidly mounted resonators with various pairs of reflecting layers. The experimental results yield an electromechanical coupling \((k_{\mathrm{eff}}^{2})\) of 1.926% and quality factor (Q) of 254 with three pairs of Mo/SiO2 layers. The figure of merit (FOM), which is defined as the product of electromechanical coupling and quality factor, has a maximum of 489 with three pairs of Mo/SiO2 layers.

Keywords

Acoustic Impedance Electromechanical Coupling Piezoelectric Layer Resonance Characteristic Microwave Theory Tech 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
This is a preview of subscription content, log in to check access.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    R.C. Ruby, P. Bradley, Y. Oshmyansky, A. Chien, 2001 IEEE Ultrason. Symp., p. 812 (2001) Google Scholar
  2. 2.
    J.D. Larson, R.C. Ruby, P.D. Bradley, J. Wen, S.L. Kok, A. Chien, 2000 IEEE Ultrason. Symp., p. 869 (2000) Google Scholar
  3. 3.
    K.M. Lakin, J. Belsick, J.F. McDonald, K.T. McCarron, 2001 IEEE Ultrason. Symp., p. 1 (2001) Google Scholar
  4. 4.
    K.M. Lakin, G.R. Kline, K.T. McCarron, IEEE Trans. Microwave Theory Tech. 43, 2933 (1995) CrossRefADSGoogle Scholar
  5. 5.
    K.M. Lakin, K.T. McCarron, J. Belsick, R. Rose, 2000 IEEE Ultrason. Symp., p. 1 (2000) Google Scholar
  6. 6.
    K.M. Lakin, J.S. Wang, Appl. Phys. Lett. 38, 125 (1981) CrossRefADSGoogle Scholar
  7. 7.
    K.M. Lakin, G.R. Kline, K.T. McCarron, IEEE Trans. Microwave Theory Tech. 41, 2139 (1993) CrossRefADSGoogle Scholar
  8. 8.
    K.M. Lakin, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52, 707 (2005) CrossRefGoogle Scholar
  9. 9.
    T. Nishihara, T. Yokoyama, T. Miyashita, Y. Satoh, 2002 IEEE Ultrason. Symp., p. 969 (2002) Google Scholar
  10. 10.
    H.P. Loebl, M. Klee, C. Metzmacher, W. Brand, R. Milsom, P. Lok, Mater. Chem. Phys. 79, 143 (2003) CrossRefGoogle Scholar
  11. 11.
    R.C. Lin, Y.C. Chen, W.T. Chang, C.C. Cheng, K.S. Kao, Sens. Actuators A Phys. 147, 425 (2008) CrossRefGoogle Scholar
  12. 12.
    W.E. Newell, Face-mounted piezoelectric resonators. Proc. IEEE 53, 575 (1965) CrossRefGoogle Scholar
  13. 13.
    K.M. Lakin, K.T. McCarron, R.E. Rose, 1995 IEEE Ultrason. Symp., p. 905 (1995) Google Scholar
  14. 14.
    H. Kanbara, H. Kobayashi, K. Nakamura, Jpn. J. Appl. Phys. 39, 3049 (2000) CrossRefADSGoogle Scholar
  15. 15.
    R. Lanz, P. Muralt, IEEE Trans. Ultrason. Ferroelect. Freq. Control 52, 936 (2005) CrossRefGoogle Scholar
  16. 16.
    C.J. Chung, Y.C. Chen, C.C. Cheng, C.L. Wei, K.S. Kao, IEEE Trans. Ultrason. Ferroelect. Freq. Control 54, 802 (2007) CrossRefGoogle Scholar
  17. 17.
    R.S. Naik, J.J. Lutsky, R. Reif, C.G. Sodini, A. Becker, L. Fetter, H. Huggins, R. Miller, J. Pastalan, G. Rittenhouse, Y.H. Wong, IEEE Trans. Ultrason. Ferroelect. Freq. Control 47, 292 (2000) CrossRefGoogle Scholar
  18. 18.
    S.H. Kim, J.H. Kim, H.D. Park, G. Yoon, J. Vac. Sci. Technol. B 19, 1164 (2001) CrossRefADSGoogle Scholar

Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • Ching-Liang Wei
    • 1
  • Ying-Chung Chen
    • 1
  • Sin-Ren Li
    • 1
  • Chien-Chuan Cheng
    • 2
  • Kuo-Sheng Kao
    • 3
  • Chung-Jen Chung
    • 4
  1. 1.Department of Electrical EngineeringNational Sun Yat-Sen UniversityKaohsiungTaiwan
  2. 2.Department of Electronic EngineeringDe Lin Institute of TechnologyTaipeiTaiwan
  3. 3.Department of Computer and CommunicationSHU-TE UniversityKaohsiungTaiwan
  4. 4.Center for Micro/Nano Science and TechnologyNational Cheng Kung UniversityTainanTaiwan

Personalised recommendations