Applied Physics A

, Volume 97, Issue 1, pp 39–43 | Cite as

Freestanding circular GaN grating fabricated by fast-atom beam etching

  • Yongjin Wang
  • Fangren Hu
  • Masashi Wakui
  • Kazuhiro Hane
Invited paper


We report here a top-down process for fabricating a freestanding circular GaN grating. The circular gratings are defined by electron-beam lithography and realized by fast-atom beam (FAB) etching. The silicon substrate below the GaN grating region is completely removed to make the circular grating suspended in space. The optical responses of the fabricated GaN gratings are characterized in reflectance measurements. The polarization-independent responses of circular gratings are experimentally demonstrated, corresponding well with the theoretical prediction. This work represents an important step in combining GaN-based material with freestanding nanostructures.


73.40.Ty 42.79.Dj 81.65.Cf 


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  1. 1.
    H.Y. Ryu, Y.H. Lee, R.L. Sellin, D. Bimberg, Over 30-fold enhancement of light extraction from free-standing photonic crystal slabs with InGaAs quantum dots at low temperature. Appl. Phys. Lett. 79, 3573 (2001) CrossRefADSGoogle Scholar
  2. 2.
    S. Boutami, B. Ben Bakir, J.-L. Leclercq, X. Letartre, P. Rojo-Romeo, M. Garrigues, P. Viktorovitch, I. Sagnes, L. Legratiet, M. Strassner, Highly selective and compact tunable MOEMS photonic crystal Fabry–Perot filter. Opt. Express 14, 3129 (2006) CrossRefADSGoogle Scholar
  3. 3.
    M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, AlN air-bridge photonic crystal nanocavities demonstrating high quality factor. Appl. Phys. Lett. 91, 051106 (2007) CrossRefADSGoogle Scholar
  4. 4.
    A. Rosenberg, K. Bussmann, M. Kim, M.W. Carter, M.A. Mastro, R.T. Holm, R.L. Henry, J.D. Caldwell, C.R. Eddy Jr., Fabrication of GaN suspended photonic crystal membranes and resonant nanocavities on Si(111). J. Vac. Sci. Technol. B 25(3), 721 (2007) CrossRefGoogle Scholar
  5. 5.
    Y.-S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S.P. DenBaars, S. Nakamura, E.L. Hu, C. Meier, GaN blue photonic crystal membrane nanocavities. Appl. Phys. Lett. 87, 243101 (2005) CrossRefADSGoogle Scholar
  6. 6.
    C. Meier, K. Hennessy, E.D. Haberer, R. Sharma, Y.-S. Choi, K. McGroddy, S. Keller, S.P. DenBaars, S. Nakamura, E.L. Hu, Visible resonant modes in GaN-based photonic crystal membrane cavities. Appl. Phys. Lett. 88, 031111 (2006) CrossRefADSGoogle Scholar
  7. 7.
    A.C. Tamboli, E.D. Haberer, R. Sharma, K.H. Lee, S. Nakamura, E.L. Hu, Room-temperature continuous-wave lasing in GaN/InGaN microdisks. Nat. Photon 1, 61 (2007) CrossRefADSGoogle Scholar
  8. 8.
    C.-C. Chen, C.-H. Hou, J.-K. Sheu, J.-Y. Chang, M.-H. Li, G.-C. Chi, C. Wu, Gratings in GaN membranes. Jpn. J. Appl. Phys. 43, 5854 (2004) CrossRefADSGoogle Scholar
  9. 9.
    T. Ono, N. Orimoto, S. Lee, T. Simizu, M. Esashi, RF-plasma-assisted fast atom beam etching. Jpn. J. Appl. Phys. 39, 6976 (2000) CrossRefADSGoogle Scholar
  10. 10.
    Y. Wang, Y. Kanamori, J. Ye, H. Sameshima, K. Hane, Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane. Opt. Express 17, 4938 (2009) CrossRefADSGoogle Scholar
  11. 11.
    C. Bauer, H. Giessen, B. Schnabel, E.-B. Kley, C. Schmitt, U. Scherf, R.F. Mahrt, A surface-emitting circular grating polymer laser. Adv. Mater. 13, 1161 (2001) CrossRefGoogle Scholar
  12. 12.
    G.A. Turnbull, A. Carleton, A. Tahraouhi, T.F. Krauss, I.D.W. Samuel, G.F. Barlow, K.A. Shore, Effect of gain localization in circular-grating distributed feedback lasers. Appl. Phys. Lett. 87, 201101 (2005) CrossRefADSGoogle Scholar
  13. 13.
    Y. Chen, Z. Li, Z. Zhang, D. Psaltis, A. Scherer, Nanoimprinted circular grating distributed feedback dye laser. Appl. Phys. Lett. 91, 051109 (2007) CrossRefADSGoogle Scholar
  14. 14.
    X. Sun, A. Yariv, Surface-emitting circular DFB, disk- and ring- Bragg resonator lasers with chirped gratings: a unified theory and comparative study. Opt. Express 16, 9155–9164 (2008) CrossRefADSGoogle Scholar

Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • Yongjin Wang
    • 1
  • Fangren Hu
    • 1
  • Masashi Wakui
    • 1
  • Kazuhiro Hane
    • 1
  1. 1.Department of NanomechanicsTohoku UniversitySendaiJapan

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