Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing
- First Online:
- 364 Downloads
This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.
PACS42.62.-b 81.05.Kf 82.50.Pt
- 14.J. Yao, Z. Cui, F. Gao, Y. Zhang, Y. Guo, C. Du, H. Zeng, C. Qiu, Microelectron. Eng. 57–58, 729 (2001) Google Scholar
- 21.F.L. Pedrotti, L. Pedrotti, L.M. Pedrotti, L.S. Pedrotti, Introduction to Optics (Benjamin Cummings, New Jersey, 2006) Google Scholar
- 26.J.W. Goodman, Introduction to Fourier Optics. McGraw-Hill Ser. Electron. Comput. Eng. (McGraw-Hill, New York, 1996) Google Scholar