Applied Physics A

, 97:751

Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

  • C. H. Lin
  • L. Jiang
  • Y. H. Chai
  • H. Xiao
  • S. J. Chen
  • H. L. Tsai
Article

Abstract

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.

PACS

42.62.-b 81.05.Kf 82.50.Pt 

References

  1. 1.
    P. Yager, T. Edwards, E. Fu, K. Helton, K. Nelson, M.R. Tam, B.H. Weigl, Nature 442, 412 (2006) CrossRefADSGoogle Scholar
  2. 2.
    P.S. Dittrich, K. Tachikawa, A. Manz, Anal. Chem. 78, 3887 (2006) CrossRefGoogle Scholar
  3. 3.
    Y. Cheng, H.L. Tsai, K. Sugioka, K. Midorikawa, Appl. Phys. A 85, 11 (2006) CrossRefADSGoogle Scholar
  4. 4.
    Y. Bellouard, A.A. Said, P. Bado, Opt. Express 13, 6335 (2005) CrossRefGoogle Scholar
  5. 5.
    K.W. Ro, K. Lim, B.C. Shim, J.H. Hahn, Anal. Chem. 77, 5160 (2005) CrossRefGoogle Scholar
  6. 6.
    K.S. Hong, J. Wang, A. Aharonov, D. Chandra, J. Aizenberg, S. Yang, J. Micromech. Microeng. 16, 1660 (2006) CrossRefADSGoogle Scholar
  7. 7.
    S. Park, Y. Jeong, J. Kim, K. Choi, H.C. Kim, D.S. Chung, K. Chun, Jpn. J. Appl. Phys. 45, 5614 (2006) CrossRefADSGoogle Scholar
  8. 8.
    A. Akatay, H. Urey, Opt. Express 15, 4523 (2007) CrossRefADSGoogle Scholar
  9. 9.
    C.P.B. Siu, H. Zeng, M. Chiao, Opt. Express 15, 11154 (2007) CrossRefADSGoogle Scholar
  10. 10.
    M. He, X.C. Yuan, N.Q. Ngo, J. Bu, S.H. Tao, J. Opt. A 6, 94 (2004) ADSGoogle Scholar
  11. 11.
    G.Y. Yoon, T. Jitsuno, M. Nakatsuka, S. Nakai, Appl. Opt. 35, 188 (1996) CrossRefADSGoogle Scholar
  12. 12.
    V. Bardinal, E. Daran, T. Leichle, C. Vergnenegre, C. Levallois, T. Camps, V. Conedera, J.B. Doucet, F. Carcenac, H. Ottevaere, H. Thienpont, Opt. Express 15, 6900 (2007) CrossRefADSGoogle Scholar
  13. 13.
    P. Nussbaum, R. Volkel, H.P. Herzig, M. Eisner, S. Haselbeck, Pure Appl. Opt. 6, 617 (1997) CrossRefADSGoogle Scholar
  14. 14.
    J. Yao, Z. Cui, F. Gao, Y. Zhang, Y. Guo, C. Du, H. Zeng, C. Qiu, Microelectron. Eng. 57–58, 729 (2001) Google Scholar
  15. 15.
    Y.Q. Fu, N. Kok, A. Bryan, Microelectron. Eng. 54, 211 (2000) CrossRefGoogle Scholar
  16. 16.
    A.Y. Smuk, N.M. Lawandy, J. Appl. Phys. 87, 4026 (2000) CrossRefADSGoogle Scholar
  17. 17.
    S. Kawata, H.B. Sun, T. Tanaka, K. Takada, Nature 412, 697 (2001) CrossRefADSGoogle Scholar
  18. 18.
    M. Masuda, K. Sugioka, Y. Cheng, T. Hongo, K. Shihiyama, H. Takai, I. Miyamoto, K. Midorikawa, Appl. Phys. A 78, 1029 (2004) CrossRefADSGoogle Scholar
  19. 19.
    Y. Cheng, K. Sugioka, K. Midorikawa, Opt. Express 13, 7225 (2005) CrossRefADSGoogle Scholar
  20. 20.
    T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, K. Midorikawa, J. Appl. Phys. 97, 063517 (2005) CrossRefADSGoogle Scholar
  21. 21.
    F.L. Pedrotti, L. Pedrotti, L.M. Pedrotti, L.S. Pedrotti, Introduction to Optics (Benjamin Cummings, New Jersey, 2006) Google Scholar
  22. 22.
    Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama, Opt. Lett. 28, 55 (2003) CrossRefADSGoogle Scholar
  23. 23.
    G. Cerullo, R. Osellame, S. Taccheo, M. Marangoni, D. Polli, R. Ramponi, P. Laporta, S. De Silvestri, Opt. Lett. 27, 1938 (2002) CrossRefADSGoogle Scholar
  24. 24.
    K.J. Moh, Y.Y. Tan, X.C. Yuan, D.K.Y. Low, Z.L. Li, Opt. Express 13, 7288 (2005) CrossRefADSGoogle Scholar
  25. 25.
    Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama, Opt. Lett. 28, 1144 (2003) CrossRefADSGoogle Scholar
  26. 26.
    J.W. Goodman, Introduction to Fourier Optics. McGraw-Hill Ser. Electron. Comput. Eng. (McGraw-Hill, New York, 1996) Google Scholar

Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • C. H. Lin
    • 1
    • 2
  • L. Jiang
    • 3
  • Y. H. Chai
    • 4
  • H. Xiao
    • 5
  • S. J. Chen
    • 1
  • H. L. Tsai
    • 2
  1. 1.Department of Engineering ScienceNational Cheng Kung UniversityTainanTaiwan
  2. 2.Department of Mechanical & Aerospace EngineeringMissouri University of Science and TechnologyRollaUSA
  3. 3.Department of Mechanical and Automation EngineeringBeijing Institute of TechnologyBeijingChina
  4. 4.Department of Electrical EngineeringTechnology and Science Institute of Northern TaiwanTaipeiTaiwan
  5. 5.Department of Electrical & Computer EngineeringMissouri University of Science and TechnologyRollaUSA

Personalised recommendations