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Applied Physics A

, Volume 97, Issue 1, pp 237–241 | Cite as

Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2

  • Young Jung Lee
  • Young Ik Seo
  • Se-Hoon Kim
  • Dae-Gun Kim
  • Young Do KimEmail author
Article

Abstract

MoO3 thin films are useful for optical devices due to their electrochromic properties. In this study, deposition of MoO2 thin films was successfully accomplished by chemical vapor transport (CVT) of volatile MoO3(OH)2. Subsequently, a MoO3 thin film was obtained by annealing of the deposited MoO2 at 400°C in an O2 atmosphere. As annealing commenced, the optical transmittance of the films increased and their absorbance peaks were broadened and red-shifted due to reduced oxygen vacancy. Thus, the molybdenum oxide thin films can successfully be deposited using the CVT technique.

PACS

78.66.-w 42.70.-a 68.55.-a 78.20.-e 42.79.-e 78.40.-q 

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Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • Young Jung Lee
    • 1
  • Young Ik Seo
    • 1
  • Se-Hoon Kim
    • 1
  • Dae-Gun Kim
    • 1
  • Young Do Kim
    • 1
    Email author
  1. 1.Division of Materials Science and EngineeringHanyang UniversitySeoulKorea

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