Advertisement

Applied Physics A

, Volume 96, Issue 3, pp 741–749 | Cite as

CO2 laser-induced crystallization of sol–gel-derived indium tin oxide films

  • X. Y. TaoEmail author
  • I. Fsaifes
  • V. Koncar
  • C. Dufour
  • C. Lepers
  • L. Hay
  • B. Capoen
  • M. Bouazaoui
Article

Abstract

Indium tin oxide (ITO) thin films prepared by the sol–gel method have been deposited by the dip-coating process on silica substrates. CO2 laser is used for annealing treatments. The electrical resistivity of sol–gel-derived ITO thin films decreased following crystallization after exposure to CO2 laser beam. The topological and electrical properties of the irradiated surfaces have been demonstrated to be strongly related to the coating solution and to the laser processing parameters. Optimal results have been obtained for 5 dip-coating layers film from 0.4 mol/l solution irradiated by 0.6 W/m2 laser power density. In this case, homogeneous and optically transparent traces were obtained with a measured sheet resistance of 1.46×102 Ω/□.

PACS

61.80.Ba 79.20.Ds 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    W. Cunningham, K. Mathieson, F.A. McEwan, A. Blue, R. McGeachy, J.A. McLeod, C. Morris-Ellis, V. O’Shea, K.M. Smith, A. Litke, M. Rahman, Fabrication of microelectrode arrays for neural measurements from retinal tissue. J. Phys. D, Appl. Phys. 34(18), 2804–2809 (2001) CrossRefADSGoogle Scholar
  2. 2.
    Y. Aoshima, M. Miyazaki, K. Sato, Y. Akao, S. Takaki, K. Adachi, Improvement of alkali durability of silver-based multilayer coatings for use in flat panel displays. Jpn J. Appl. Phys., Part 1, Regular Pap. Short Notes Rev. Pap. 40(6A), 4166–4170 (2001) Google Scholar
  3. 3.
    J. Calderer, J.C. Manifacier, L. Szepessy, J.M. Darolles, M. Perotin, Silicon (normal-type)-In2O3 (sn doped) solar-cells characterization. Rev. Phys. Appl. 14(3), 485–490 (1979) Google Scholar
  4. 4.
    M. Boehme, C. Charton, Properties of ITO on pet film in dependence on the coating conditions and thermal processing. Surf. Coat. Technol. 200(1–4), 932–935 (2005) CrossRefGoogle Scholar
  5. 5.
    Y. Shigesato, D.C. Paine, T.E. Haynes, Lattice-defects in o+ implanted tin-doped indium oxide-films. Jpn. J. Appl. Phys., Part 2, Lett. 32(9B), L1352–L1355 (1993) CrossRefGoogle Scholar
  6. 6.
    J.C. Manifacier, L. Szepessy, J.F. Bresse, M. Perotin, R. Stuck, In2O3-(sn) and SnO2-(f) films—application to solar-energy conversion. 1. preparation and characterization. Mater. Res. Bull. 14(1), 109–119 (1979) CrossRefGoogle Scholar
  7. 7.
    B. Bessais, N. Mliki, R. Bennaceur, Technological, structural and morphological aspects of screen-printed ITO used in ITO Si type-structure. Semicond. Sci. Technol. 8(1), 116–121 (1993) CrossRefADSGoogle Scholar
  8. 8.
    O. Yavas, M. Takai, High-speed maskless laser patterning of thin films for giant microelectronics. Jpn. J. Appl. Phys., Part 1, Regular Pap. Short Notes Rev. Pap. 38(12B), 7131–7134 (1999) Google Scholar
  9. 9.
    O. Yavas, M. Takai, Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films. J. Appl. Phys. 85(8), 4207–4212 (1999) CrossRefADSGoogle Scholar
  10. 10.
    J.G. Lunney, R.R. Oneill, K. Schulmeister, Excimer laser etching of transparent conducting oxides. Appl. Phys. Lett. 59(6), 647–649 (1991) CrossRefADSGoogle Scholar
  11. 11.
    H. Imai, A. Tominaga, H. Hirashima, M. Toki, M. Aizawa, Ultraviolet-laser-induced crystallization of sol–gel derived indium oxide films. J. Sol-Gel Sci. Technol. 13(1–3), 991–994 (1998) CrossRefGoogle Scholar
  12. 12.
    H. Imai, A. Tominaga, H. Hirashima, M. Toki, N. Asakuma, Ultraviolet-reduced reduction and crystallization of indium oxide films. J. Appl. Phys. 85(1), 203–207 (1999) CrossRefADSGoogle Scholar
  13. 13.
    N. Asakuma, T. Fukui, M. Toki, H. Imai, Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates. J. Sol-Gel Sci. Technol. 27(1), 91–95 (2003) CrossRefGoogle Scholar
  14. 14.
    M.F. Chen, Y.P. Chen, W.T. Hsiao, Z.P. Gu, Laser direct write patterning technique of indium tin oxide film. Thin Solid Films 515(24), 8515–8518 (2007) CrossRefADSGoogle Scholar
  15. 15.
    J.G. Liu, C.H. Chen, J.S. Zheng, J.Y. Huang, CO2 laser direct writing of silver lines on epoxy resin from solid film. Appl. Surf. Sci. 245(1–4), 155–161 (2005) CrossRefADSGoogle Scholar
  16. 16.
    A. Beaurain, D. Luxembourg, C. Dufour, V. Koncar, B. Capoen, M. Bouazaoui, Effects of annealing temperature and heat-treatment duration on electrical properties of sol–gel derived indium-tin-oxide thin films. Thin Solid Films 516(12), 4102–4106 (2008) Google Scholar
  17. 17.
    J. Bischof, D. Scherer, S. Herminghaus, P. Leiderer, Dewetting modes of thin metallic films: Nucleation of holes and spinodal dewetting. Phys. Rev. Lett. 77(8), 1536–1539 (1996) CrossRefADSGoogle Scholar
  18. 18.
    T. Tanaka, Gels. Sci. Am. 244(1), 124 (1981) CrossRefGoogle Scholar
  19. 19.
    J. Livage, The gel route to transition-metal oxides. J. Solid State Chem. 64(3), 322–330 (1986) CrossRefADSGoogle Scholar
  20. 20.
    J.N. Israelachvili, Measurements of hydration forces between macroscopic surfaces. Chem. Scr. 25(1), 7–14 (1985) Google Scholar
  21. 21.
    R.Q. Packard, Moisture stress in unfired ceramic clay bodies. J. Am. Ceram. Soc. 50(5), 223–229 (1967) CrossRefMathSciNetGoogle Scholar
  22. 22.
    G.W. Scherer, Correction of drying gels. 1. General-theory. J. Non-Cryst. Solids 92(2–3), 375–382 (1987) CrossRefADSGoogle Scholar
  23. 23.
    P.G. Simpkins, D.W. Johnson, D.A. Fleming, Drying behavior of colloidal silica-gels. J. Am. Ceram. Soc. 72(10), 1816–1821 (1989) CrossRefGoogle Scholar
  24. 24.
    G.W. Scherer, Drying gels. 8. Revision and review. J. Non-Cryst. Solids 109(2–3), 171–182 (1989) CrossRefADSGoogle Scholar
  25. 25.
    I. Strawbridge, P.F. James, Thin silica films prepared by dip coating. J. Non-Cryst. Solids 82(1–3), 366–372 (1986) CrossRefADSGoogle Scholar
  26. 26.
    I. Strawbridge, P.F. James, The factors affecting the thickness of sol–gel derived silica coatings prepared by dipping. J. Non-Cryst. Solids 86(3), 381–393 (1986) CrossRefADSGoogle Scholar

Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • X. Y. Tao
    • 1
    Email author
  • I. Fsaifes
    • 2
  • V. Koncar
    • 1
  • C. Dufour
    • 3
  • C. Lepers
    • 2
  • L. Hay
    • 2
  • B. Capoen
    • 2
  • M. Bouazaoui
    • 2
  1. 1.ENSAIT/GEMTEXRoubaixFrance
  2. 2.Laboratoire PhLAM, CNRS UMR 8523Université des Sciences et Technologies de LilleVilleneuve d’AscqFrance
  3. 3.IEMN, CNRS, UMR 8520Université des Sciences et Technologies de LilleVilleneuve d’AscqFrance

Personalised recommendations