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Applied Physics A

, Volume 95, Issue 3, pp 781–787 | Cite as

Simple fabrication of hexagonally well-ordered AAO template on silicon substrate in two dimensions

  • Nevin Taşaltın
  • Sadullah Öztürk
  • Necmettin Kılınç
  • Hayrettin Yüzer
  • Zafer Ziya Öztürk
Article

Abstract

In this study, thin anodic aluminum oxide (AAO) templates both on silicon substrates (AAO template/SiO2/Si) and Ti-coated silicon substrates (AAO template/Ti/SiO2/Si) were developed for design of magnetic, electronic and optoelectronic devices, chemical sensors and chip-scale lithium-ion rechargeable microbatteries. Two types of AAO template were prepared by using a two-step anodization procedure. The templates were characterized by scanning electron microscopy and energy dispersive X-ray spectroscopy. The obtained thin AAO templates were approximately 50 nm in diameter and 700 nm in length with 80-nm interpore distances in a relatively large area of 6 cm2. A barrier layer of the AAO templates was removed by a cathodic polarization method in KCl solution for several seconds. The current–time transient during removing the alumina barrier layer of the thin AAO template and the mechanism of electrochemical dissolution of the barrier layer are given in detail.

PACS

81.07.De 81.16.Be 82.45.Yz 

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Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • Nevin Taşaltın
    • 1
  • Sadullah Öztürk
    • 1
  • Necmettin Kılınç
    • 1
  • Hayrettin Yüzer
    • 2
  • Zafer Ziya Öztürk
    • 1
    • 2
  1. 1.Department of PhysicsGebze Institute of TechnologyGebze KocaeliTurkey
  2. 2.TUBITAK Marmara Research CentreGebze KocaeliTurkey

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