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Applied Physics A

, 94:139 | Cite as

Amorphous stainless steel coatings prepared by reactive magnetron-sputtering from austenitic stainless steel targets

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Abstract

Stainless steel films were reactively magnetron sputtered in argon/methane gas flow onto oxidized silicon wafers using austenitic stainless-steel targets. The deposited films of about 200 nm thickness were characterized by conversion electron Mössbauer spectroscopy, magneto–optical Kerr-effect, X-ray diffraction, scanning electron microscopy, Rutherford backscattering spectrometry, atomic force microscopy, corrosion resistance tests, and Raman spectroscopy. These complementary methods were used for a detailed examination of the carburization effects in the sputtered stainless-steel films. The formation of an amorphous and soft ferromagnetic phase in a wide range of the processing parameters was found. Further, the influence of the substrate temperature and of post vacuum-annealing were examined to achieve a comprehensive understanding of the carburization process and phase formation.

PACS

81.15.Cd 81.65.Lp 82.80.Ej 61.43.Dq 68.55.Jk 
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© The Author(s) 2008

Authors and Affiliations

  1. 1.II. Physikalisches InstitutUniversität GöttingenGöttingenGermany
  2. 2.Institut für Werkstofftechnik, FG Werkstoffe der ElektrotechnikTU IlmenauIlmenauGermany

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