Advertisement

Applied Physics A

, Volume 93, Issue 1, pp 197–201 | Cite as

Fs-Laser structuring of ridge waveguides

  • D. WortmannEmail author
  • J. Gottmann
Article

Abstract

Thin films made by PLD from Er:ZBLAN and Nd:Gd3Ga5O12 are micro machined to form optical wave guiding structures using Ti:sapphire and Yb:glass fiber laser radiation. For the manufacturing of the ridge waveguides grooves are structured by ablation using femtosecond laser radiation. The fluence, the scanning velocity, the repetition rate, and the orientation of the polarization with respect to the scanning direction are varied. The resulting structures are characterized using optical microscopy and scanning electron microscopy. Damping and absorption coefficients of the waveguides are determined by observing the light scattered from the waveguides due to droplets in the thin films and the surface roughness of the structured edges. To discriminate between damping due to droplets and the structured edges, damping measurements in the non-structured films and the structured waveguides are performed. Ridge waveguides with non-resonant damping losses smaller than 3 dB/cm are achieved. Due to the high repetition rate of the Yb:glass fiber laser, the manufacturing time for one waveguide has been decreased by a factor of more than 100 compared to earlier results achieved with the Ti:sapphire laser.

PACS

42.70.Hj 42.82.Gw 81.16.Rf 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    C.L. Bonner, A.A. Anderson, R.W. Eason, D.P. Shepherd, D.S. Gill, C. Grivas, N. Vainos, Opt. Lett. 22, 988–990 (1997) CrossRefADSGoogle Scholar
  2. 2.
    D.S. Gill, A.A. Anderson, R.W. Eason, T.J. Warburton, D.P. Sheperd, Appl. Phys. Lett. 69, 10–12 (1996) CrossRefADSGoogle Scholar
  3. 3.
    C. Grivas, T.C. May-Smith, D.P. Shepherd, R.W. Eason, Appl. Phys. A 79, 1203–1206 (2004) ADSGoogle Scholar
  4. 4.
    V. Bogdanov, W. Gibbs, D. Booth, J. Javorniczky, P. Newman, D. MacFarlane, J. Non-Cryst. Solids 256–257, 288–293 (1999) CrossRefGoogle Scholar
  5. 5.
    J. Gottmann, L. Moiseev, I. Vasilief, D. Wortmann, Mater. Sci. Eng. B (2007). doi: 10.1016/j.mseb.2007.07.088
  6. 6.
    J. Gottmann, D. Wortmann, I. Vasilief, L. Moiseev, D. Ganser, Appl. Surf. Sci. 254(4), 1105–1110 (2007) CrossRefADSGoogle Scholar
  7. 7.
    Z. Guosheng, P. Fauchet, A. Siegman, Phys. Rev. B 26(10) (1982) Google Scholar
  8. 8.
    P. Rudolph, W. Kautek, Thin Solid Films 453–454, 537–541 (2004) CrossRefGoogle Scholar
  9. 9.
    H. Sun, F. He, Z. Zhou, Y. Cheng, Z. Xu, K. Sugioka, K. Midorikawa, Opt. Lett. 32, 1536–1538 (2007) CrossRefADSGoogle Scholar
  10. 10.
    N. Yasumaru, K. Miyazaki, J. Kiuchi, Appl. Phys. A 76, 983 (2003) CrossRefADSGoogle Scholar
  11. 11.
    R. Wagner, J. Gottmann, J. Phys.: Conf. Ser. 59, 333–337 (2007) CrossRefADSGoogle Scholar

Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  1. 1.Lehrstuhl fuer LasertechnikRWTH Aachen UniversityAachenGermany

Personalised recommendations