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Applied Physics A

, Volume 91, Issue 4, pp 567–571 | Cite as

Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution

  • J. Meijer
  • S. Pezzagna
  • T. Vogel
  • B. Burchard
  • H.H. Bukow
  • I.W. Rangelow
  • Y. Sarov
  • H. Wiggers
  • I. Plümel
  • F. Jelezko
  • J. Wrachtrup
  • F. Schmidt-Kaler
  • W. Schnitzler
  • K. Singer
Invited paper

Abstract

Decreasing structure sizes in both conventional and quantum solid state devices require novel fabrication methods: we present a technology which allows to implant ions through a small hole in the tip of an atomic force microscope. This technique offers a maskless addressing of small structures using different projectiles at kinetic energies between 0.5 and 5.0 keV. Our method aims to implant single atomic ions, molecular ions or charged nanoparticles with nm resolution. We test the method by implanting N+ ions into diamond and generating nitrogen-vacancy color centers. The system is operated with a conventional ion gun. However, in future we will employ an ion trap as a deterministic source of cold single ions.

Keywords

Atomic Force Microscope Atomic Force Microscope System Atomic Force Microscope Operation Nanoparticle Beam Atomic Force Microscope Device 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  • J. Meijer
    • 1
  • S. Pezzagna
    • 1
  • T. Vogel
    • 1
  • B. Burchard
    • 1
  • H.H. Bukow
    • 1
  • I.W. Rangelow
    • 2
  • Y. Sarov
    • 2
  • H. Wiggers
    • 3
  • I. Plümel
    • 3
  • F. Jelezko
    • 4
  • J. Wrachtrup
    • 4
  • F. Schmidt-Kaler
    • 5
  • W. Schnitzler
    • 5
  • K. Singer
    • 5
  1. 1.RUBIONRuhr-Universität BochumBochumGermany
  2. 2.Department of Micro- and Nanoelectronical Systems, Institute of Micro- and NanoelectronicsTechnical University of IlmenauIlmenauGermany
  3. 3.Institut für Verbrennung und GasdynamikUniversität Duisburg-EssenDuisburgGermany
  4. 4.3. Physikalisches InstitutUniversity StuttgartStuttgartGermany
  5. 5.Institut für QuanteninformationsverarbeitungUniversity UlmUlmGermany

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