Applied Physics A

, Volume 90, Issue 2, pp 205–209 | Cite as

Fabrication of 3D metal/polymer microstructures by site-selective metal coating

  • N. TakeyasuEmail author
  • T. Tanaka
  • S. Kawata


Three-dimensional silver/polymer conjugated microstructures were fabricated by site-selective metal deposition on photopolymer structures in the sub-micrometer scale. Photopolymerizable resins with and without an amide group were independently prepared, and a three-dimensional polymer structure was fabricated with those resins by means of the two-photon-induced photopolymerization technique to confine the photopolymerization to a sub-micrometer volume. Silver was selectively deposited on the surface of the amide-containing polymer parts by electroless plating. This method can provide 3D arbitrary silver/polymer composite microstructures with sub-micrometer resolution.


Polymer Structure Photopolymerization Electroless Plating Silver Deposition Silver Coating 
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Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  1. 1.Nanophotonics LaboratoryRIKEN (The Institute of Physical and Chemical Research)SaitamaJapan
  2. 2.PRESTO, JSTSaitamaJapan
  3. 3.Department of Applied PhysicsOsaka UniversityOsakaJapan
  4. 4.CREST, JSTSaitamaJapan

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