Applied Physics A

, Volume 89, Issue 1, pp 161–163 | Cite as

Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells

  • S. ZoppelEmail author
  • H. Huber
  • G.A. Reider


We report on recent results on selective ablation of TCO (SnO2, ZnO) and metallic layers as a possible process for structuring thin film solar cells. The multipulse ablation thresholds determined for substrate and various thin films show a parameter window where the films can be completely removed by a single scan without at the same time damaging the underlying material. By employing ultrashort pulsed lasers, nonthermal ablation at repetition rates up to the megahertz regime enables high quality structuring combined with process speeds meeting industrial demands.


Solar Cell Process Speed Femtosecond Laser Pulse Ultrashort Pulse Laser Ablation Threshold 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    R.R. Gay, Sol. Energ. Mater. Sol. Cells 47, 19 (1997)CrossRefGoogle Scholar
  2. 2.
    A. Goetzberger, C. Hebling, Sol. Energ. Mater. Sol. Cells 62, 1 (2000)CrossRefGoogle Scholar
  3. 3.
    S. Preuss, A. Demchuk, M. Stuke, Appl. Phys. A 61, 33 (1995)ADSGoogle Scholar
  4. 4.
    D. Ashkenasi, G. Muller, A. Rosenfeld, R. Stoian, I.V. Hertel, N.M. Bulgakova, E.E.B. Campbell, Appl. Phys. A 77, 223 (2003)ADSGoogle Scholar
  5. 5.
    K. Zimmer, J. Dienelt, F. Herfurth, A. Braun, K. Otte, G. Lippold, V. Gottschalch, F. Bigl, Appl. Surf. Sci. 127129, 800 (1998)Google Scholar
  6. 6.
    J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, P. Alloncle, J. Phys. D Appl. Phys. 39, 453 (2006)CrossRefADSGoogle Scholar
  7. 7.
    A.D. Compaan, I. Matulionis, S. Nakade, Opt. Laser Eng. 34, 15 (2000)Google Scholar
  8. 8.
    J.M. Liu, Opt. Lett. 7, 196 (1982)ADSCrossRefGoogle Scholar
  9. 9.
    Z. Guosheng, P.M. Fauchet, A.E. Siegman, Phys. Rev. B 26, 5366 (1982)CrossRefADSGoogle Scholar
  10. 10.
    J. Bonse, S. Baudach, J. Krüger, W. Kautek. M. Lenzner, Appl. Phys. A 74, 19 (2002)CrossRefADSGoogle Scholar

Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  1. 1.Photonics InstituteVienna University of TechnologyViennaAustria
  2. 2.Research Center for MicrotechnologiesVorarlberg University of Applied SciencesDornbirnAustria
  3. 3.HighQLaser Production GmbHHohenemsAustria

Personalised recommendations