Applied Physics A

, Volume 89, Issue 1, pp 209–212 | Cite as

Characterization of the bonding structure of nanocrystalline diamond and amorphous carbon films prepared by plasma assisted techniques

  • C. Popov
  • W. Kulisch
  • S. Bliznakov
  • B. Mednikarov
  • G. Spasov
  • J. Pirov
  • M. Jelinek
  • T. Kocourek
  • J. Zemek
Article

Abstract

Thin nanocrystalline diamond/amorphous carbon (NCD/a-C) composite films and amorphous diamond-like carbon (DLC) films were prepared by three methods: microwave plasma chemical vapour deposition (MWCVD) from methane/nitrogen mixtures (NCD/a-C), RF magnetron sputtering of a pure graphite target in argon/methane ambients, and pulsed laser deposition (PLD) in vacuum or argon atmosphere (DLC). The films prepared by the three techniques were comprehensively characterized with respect to their bonding structure by Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS).

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Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  • C. Popov
    • 1
  • W. Kulisch
    • 1
    • 2
  • S. Bliznakov
    • 1
  • B. Mednikarov
    • 3
  • G. Spasov
    • 3
  • J. Pirov
    • 3
  • M. Jelinek
    • 4
  • T. Kocourek
    • 4
  • J. Zemek
    • 4
  1. 1.Institute of Nanostructure Technologies and Analytics (INA)University of KasselKasselGermany
  2. 2.JRCInstitute for Health and Consumer ProtectionIspraItaly
  3. 3.Central Laboratory of PhotoprocessesBulgarian Academy of SciencesSofiaBulgaria
  4. 4.Institute of PhysicsAcademy of Sciences of the Czech RepublicPrague 8Czech Republic

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