Applied Physics A

, Volume 88, Issue 4, pp 719–725

Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics

  • J. Gautier
  • F. Delmotte
  • F. Bridou
  • M.F. Ravet
  • F. Varniere
  • M. Roulliay
  • A. Jerome
  • I. Vickridge
Article

Abstract

Scandium/silicon multilayers have been deposited by magnetron sputtering and characterized by several techniques. Experimental peak reflectances of 0.22 and 0.37 have been measured respectively at wavelengths of 40 nm and 46 nm, for 10° incidence angle. The corresponding theoretical values for a perfect Sc/Si structure are respectively 0.38 and 0.57. In order to explain these differences between calculated and measured reflectivity, thin film and multilayer characterizations have been done. Effects of multilayer imperfections on the reflectivity have been estimated independently by means of simulation. Based on these results, a new design of Sc/Si multilayer is proposed with top layer thickness optimization. With this design, the experimental peak reflectance reaches 0.46 at a wavelength of 46 nm.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J.J. Rocca et al., Phys. Rev. Lett. 74, (1994)Google Scholar
  2. 2.
    E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, P. Agostini, Phys. Rev. Lett. 82, 1668 (1999)CrossRefADSGoogle Scholar
  3. 3.
    D.L. Windt, S.D., J.F. Seely, B. Kjornrattanawanich, E.M. Gullikson, C.C. Walton, L. Golub, E. DeLuca, in Proceedings of SPIE in Optics for EUV, X-ray, and Gamma-Ray Astronomy, ed. by O. Citterio, S.L. O’Dell, vol. 5168 (SPIE, Bellingham, WA, 2003), pp. 1–11Google Scholar
  4. 4.
    Y.A. Uspenskii, S.V. Antonov, V.Y. Fedotov, A.V. Vinogradov, in Proceedings of SPIE in Soft X-Ray Lasers and Applications II, ed. by J.J. Rocca, L.B. Da Silva, vol. 3156 (SPIE, Bellingham, WA, 1997) p. 288Google Scholar
  5. 5.
    Y.A. Upspenskii, V.E. Levashov, A.V. Vinogradov, A.I. Fedorenko, V.V. Kondratenko, Y.P. Pershin, E.N. Zubarev, S. Mrowka, F. Schäfers, Nucl. Instrum. Methods Phys. Res. A 448, 147 (2000)CrossRefADSGoogle Scholar
  6. 6.
    A.V. Vinogradov, Y.P. Pershin, E.N. Zubarev, D.L. Voronov, A.V. Pen’kov, V.V. Kondratenko, Y.A. Uspenskii, I.A. Artioukov, J.F. Seely, in Proceedings of SPIE in Soft X-Ray Lasers and Applications IV, ed. by E.E. Fill, J.G. Rocca (SPIE, Bellingham, WA, 2001)Google Scholar
  7. 7.
    A.I. Fedorenko, Y.P. Pershin, O.V. Poltseva, A.G. Ponomarenko, V.S. Sevryukova, D.L. Voronov, E.N. Zubarev, J. X-ray Sci. Technol. 9, 35 (2001)Google Scholar
  8. 8.
    A.F. Jankowski, C.K. Saw, C.C. Walton, J.P. Hayes, J. Nilsen, Thin Solid Films 469470, 372 (2004)Google Scholar
  9. 9.
    S. Yulin, F. Schafers, T. Feigl, N. Kaiser, in Proceedings of SPIE in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, ed. by A.M. Khounsary, U. Dinger, K. Ota (SPIE, Bellingham, WA, 2004), vol. 5193, p. 155Google Scholar
  10. 10.
    M. Grisham, G. Vaschenko, C.S. Menoni, J.J. Rocca, Y.P. Pershyn, E.N. Zubarev, D.L. Voronov, V.A. Sevryukova, V.V. Kondratenko, A.V. Vinogradov, I.A. Artioikov, Opt. Lett. 29, 620 (2004)CrossRefADSGoogle Scholar
  11. 11.
    J. Gautier, F. Delmotte, M. Roulliay, M.F. Ravet, F. Bridou, A. Jerome, A. Giglia, S. Nannarone, in Proceedings SPIE Advances in Optical Thin Films II, ed. by C. Amra, N. Kaiser, H.A. Macleod (SPIE, Bellingham, WA, 2005), vol. 5963, p. 270Google Scholar
  12. 12.
    B.L. Henkee et al.. Data Nucl. Data Tables 54, (1993)Google Scholar
  13. 13.
    N. Kaiser, S. Yulin, T. Feigl, H. Bernitzki, H. Lauth, in Proceedings of SPIE in Advances in Optical Thin Film, ed. by C. Amra, N. Kaiser, H.A. Macleod (SPIE, Bellingham, WA, 2004), vol. 5250, p. 109Google Scholar
  14. 14.
    Y.A. Uspenskii, J.F. Seely, N.L. Popov, A.V. Vinogradov, Y.P. Pershin, V.V. Kondratenko, J. Opt. Soc. Am. A 21, 298 (2004)CrossRefADSGoogle Scholar
  15. 15.
    F. Bridou, B. Pardo, J. Opt. 21, 183 (1990)CrossRefADSGoogle Scholar
  16. 16.
    F. Bridou, J. Gautier, F. Delmotte, M.F. Ravet, O. Durand, M. Modreanu, Surf. Coat. Technol. 189,Google Scholar
  17. 17.
    F. Bridou, J. Gautier, F. Delmotte, M.F. Ravet, O. Durand, M. Modreanu, Appl. Surf. Sci. 253, 12 (2006)CrossRefADSGoogle Scholar
  18. 18.
    L. Pasquali, A. DeLuisa, S. Nannarone, in Proceedings of SRI 13 Conference, San Francisco (2003), vol. 705, p. 1142Google Scholar
  19. 19.
    H. Maury, P. Jonnard, J.-M. André, J. Gautier, M. Roulliay, F. Bridou, F. Delmotte, M.-F. Ravet, A. Jérome, P. Holliger, Thin Solid Films 514, 278 (2006)CrossRefGoogle Scholar
  20. 20.
    D.L. Windt, Comput. Phys. 12, 360 (1998)CrossRefADSGoogle Scholar
  21. 21.
    Center for X-Ray Optics, http//www-cxro.lbl.gov (cited 2006)Google Scholar
  22. 22.
    E.D. Palik, Handbook of Optical Constants of Solids (Academic Press, New York, 1985)Google Scholar
  23. 23.
    A.I. Erko, V.V. Aristov, B. Vidal, Diffraction X-ray Optics, chapt. 1 (Institut of Physics, 1996)Google Scholar
  24. 24.
    E. Spiller, Soft X-ray Optics (SPIE, Bellingham, Washington, 1994), chapt. 8Google Scholar
  25. 25.
    M. Singh, J.M. Braat, Opt. Lett. 26, 259 (2001)ADSGoogle Scholar

Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  • J. Gautier
    • 1
  • F. Delmotte
    • 1
  • F. Bridou
    • 1
  • M.F. Ravet
    • 1
  • F. Varniere
    • 1
  • M. Roulliay
    • 1
  • A. Jerome
    • 1
  • I. Vickridge
    • 2
  1. 1.Laboratoire Charles Fabry de l’Institut d’Optique, CNRSUniv. Paris SudPalaiseau CedexFrance
  2. 2.Institut des NanoSciences de ParisParisFrance

Personalised recommendations