Applied Physics A

, Volume 87, Issue 3, pp 525–529 | Cite as

Selectivity enhancement of gas sensors using non-equilibrium polarisation effects in metal oxide films

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Abstract

The gas sensing behaviour of granular tungsten oxide films under the influence of a polarizing electrical field is investigated. The Ohmic resistance of the film in the direction of applied voltage is altered in a reversible way due to ionic transport processes in the film. Several processes with a wide range of time constants from ∼100 ms to 100 s occur. A model is proposed to describe the movement of bulk donors and related changes of the surface charge. Within the model sensor instabilities are described which can be prevented by a pulse technique for readout. As an benefit a single sensor element used in different polarization states can discern several gases.

Keywords

Tungsten Oxide Indium Oxide Relaxation Phase Selectivity Enhancement Relative Slope 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  1. 1.Institute of Applied PhysicsJustus-Liebig Universität GiessenGiessenGermany

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