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Applied Physics A

, Volume 87, Issue 4, pp 767–772 | Cite as

Structural and tribological properties of cluster-assembled CNx films

  • M. Blomqvist
  • G. Bongiorno
  • A. Podestà
  • V. Serin
  • G. Abrasonis
  • U. Kreissig
  • W. Möller
  • E. Coronel
  • S. Wachtmeister
  • S. Csillag
  • V. Cassina
  • P. Piseri
  • P. MilaniEmail author
Article

Abstract

We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system.

Keywords

Atomic Force Microscope Substrate Temperature Tribological Property Carbon Nitride Elastic Recoil Detection Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  • M. Blomqvist
    • 1
  • G. Bongiorno
    • 1
  • A. Podestà
    • 1
  • V. Serin
    • 2
  • G. Abrasonis
    • 3
  • U. Kreissig
    • 3
  • W. Möller
    • 3
  • E. Coronel
    • 4
  • S. Wachtmeister
    • 5
  • S. Csillag
    • 5
  • V. Cassina
    • 1
  • P. Piseri
    • 1
  • P. Milani
    • 1
    Email author
  1. 1.Dipartimento di Fisica and CIMAINAUniversità di MilanoMilanoItaly
  2. 2.CEMES-CNRSToulouse CedexFrance
  3. 3.Institute of Ion Beam Physics and Materials ResearchForschungszentrum Dresden-RossendorfDresdenGermany
  4. 4.The Tribomaterials Group at Ångström LaboratoryUppsala UniversityUppsalaSweden
  5. 5.Department of PhysicsStockholm University, SCFABStockholmSweden

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