Applied Physics A

, Volume 86, Issue 1, pp 49–54 | Cite as

Fabrication of polaritonic structures in LiNbO3 and LiTaO3 using femtosecond laser machining

  • D.W. WardEmail author
  • E.R. Statz
  • K.A. Nelson


Fabrication of patterned materials in ferroelectric LiNbO3 and LiTaO3 crystals using femtosecond laser micromachining is presented and discussed. Damage feature sizes in the 10–100 μm range were achieved using 800-nm, 50-fs (FWHM) ultra-fast laser pulses with energies ranging from 10 μJ up to 350 μJ. Fabrication of polaritonic devices such as waveguides, resonators, focusing reflectors, diffractive and dispersive elements, photonic band gap materials, and other microstructures is demonstrated.


Femtosecond Laser Numerical Aperture Laser Pulse Energy Crystal Thickness High Laser Pulse 
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Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  1. 1.Department of ChemistryMassachusetts Institute of TechnologyCambridgeUSA

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