The characteristics of laser micro drilling using a Bessel beam
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A Bessel beam is suitable for laser micro-fabrication because it possesses both a micron-sized focal spot and a deep focal depth. As the influence of focusing aberrations is much smaller than that of a convex lens, the generation of a Bessel beam using an axicon is very practical. In the case of laser micro drilling of austenitic stainless steel with a Bessel beam, suitable processing conditions were investigated. The threshold fluence to make a through hole increased with an increase in the sample thickness. For samples with the same thickness, the threshold fluence increased with an increase in the crossing angle. A small crossing angle Bessel beam can drill a deep hole with a small threshold fluence. A through hole with a diameter smaller than 10 μm can be made on a stainless steel sheet 20 μm thick by using a Bessel beam with a large crossing angle. The taper of the hole drilled with the Bessel beam is smaller than that with the focused beam from the convex lens.
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- 5.Y. Matsuoka, Rev. Laser Eng. 32, 131 (2004)Google Scholar
- 6.Y. Matsuoka, T. Inoue, Y. Kizuka, M. Yamauchi, S. Maruyama, T. Kinoshita, Rev. Laser Eng. 33, 615 (2005)Google Scholar
- 9.Y. Matsuoka, T. Inoue, Rev. Laser Eng. 33, 404 (2005)Google Scholar
- 10.T.V. Kononenko, S.V. Garnov, S.M. Klimentov, V.I. Konov, E.N. Loubnin, F. Dausinger, A. Raiber, C. Taut, Appl. Surf. Sci. 109/110, 48 (1997)Google Scholar
- 12.T.V. Kononenko, V.I. Konov, S.V. Garnov, S.M. Klimentov, F. Dausinger, Laser Phys. 11, 343 (2001)Google Scholar