Applied Physics A

, Volume 83, Issue 3, pp 447–451

Top-gathering pillar array of hybrid organic–inorganic material by means of self-organization

  • H. Segawa
  • S. Yamaguchi
  • Y. Yamazaki
  • T. Yano
  • S. Shibata
  • H. Misawa
Article

Abstract

Two-dimensional (2D) pillar arrays with submicrometer to micrometer repetitions have been fabricated from hybrid organic–inorganic material by mask lithography or multi-beam interference lithography. The type of array structure depends on structural parameters such as the pillar height, diameter and distance between neighboring pillars. Two kinds of periodic arrays, 2D arrays and ‘top-gathering’ arrays, can be obtained by controlling the structural parameters. In the top-gathering arrays, the pillars are gathered at the top by means of self-organization, and ‘top-gathering’ units composed of four pillars can be formed.

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Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • H. Segawa
    • 1
    • 2
  • S. Yamaguchi
    • 1
  • Y. Yamazaki
    • 1
  • T. Yano
    • 1
  • S. Shibata
    • 1
  • H. Misawa
    • 3
  1. 1.Tokyo Institute of TechnologyTokyoJapan
  2. 2.PRESTO-JSTJapan Science and Technology Corporation (JST)KawaguchiJapan
  3. 3.CREST-JSTHokkaido UniversitySapporoJapan

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