Applied Physics A

, Volume 83, Issue 2, pp 321–327 | Cite as

Concept of deterministic single ion doping with sub-nm spatial resolution

  • J. Meijer
  • T. Vogel
  • B. Burchard
  • I.W. Rangelow
  • L. Bischoff
  • J. Wrachtrup
  • M. Domhan
  • F. Jelezko
  • W. Schnitzler
  • S.A. Schulz
  • K. SingerEmail author
  • F. Schmidt-Kaler


We propose a method for deterministic implantation of single atoms into solids which relies on a linear ion trap as an ion source. Our approach allows a deterministic control of the number of implanted atoms and a spatial resolution of less than 1 nm. Furthermore, the method is expected to work for almost all chemical elements. The deterministic implantation of single phosphor or nitrogen atoms is interesting for the fabrication of scalable solid state quantum computers, in particular for silicon and diamond based schemes. A wide range of further applications is expected for the fabrication of nano and sub-nano electronic devices.


Electromagnetically Induce Transparency Paul Trap Linear Paul Trap Quantum Gate Operation Ground State Cool 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • J. Meijer
    • 1
  • T. Vogel
    • 1
  • B. Burchard
    • 2
  • I.W. Rangelow
    • 3
  • L. Bischoff
    • 4
  • J. Wrachtrup
    • 5
  • M. Domhan
    • 5
  • F. Jelezko
    • 5
  • W. Schnitzler
    • 6
  • S.A. Schulz
    • 6
  • K. Singer
    • 6
    Email author
  • F. Schmidt-Kaler
    • 6
  1. 1.RUBIONRuhr-Universität BochumBochumGermany
  2. 2.Institut für Physik mit IonenstrahlenRuhr-Universität BochumBochumGermany
  3. 3.Institut für Nanostrukturtechnologie und Analytik (INA)Universität KasselKasselGermany
  4. 4.Institute of Ion Beam Physics and Materials ResearchForschungszentrum Rossendorf e.V.DresdenGermany
  5. 5.Physikalisches InstitutUniversität StuttgartStuttgartGermany
  6. 6.Abteilung Quanten-InformationsverarbeitungUniversität UlmUlmGermany

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