Applied Physics A

, Volume 80, Issue 4, pp 683–685 | Cite as

Femtosecond laser microfabrication of periodic structures using a microlens array

Rapid communication


A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    I. Miyamoto, A. Ostendorf, K. Sugioka, H. Helvajian (Eds.): Proc. SPIE 5063 (2003)Google Scholar
  2. 2.
    E. Glezer, E. Mazur: Appl. Phys. Lett. 71, 882 (1997)ADSCrossRefGoogle Scholar
  3. 3.
    E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, H. Misawa: Appl. Phys. Lett. 82, 2901 (2003)ADSCrossRefGoogle Scholar
  4. 4.
    K. Fujita, O. Nakamura, T. Kaneko, S. Kawata, M. Oyamada, T. Takamatsu: J. Microsc. 194, 528 (1999)CrossRefGoogle Scholar
  5. 5.
    T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, H. Misawa: Appl. Phys. Lett. 82, 2758 (2003)ADSCrossRefGoogle Scholar
  6. 6.
    J.A. Hoffnagle, C.M. Jefferson: Appl. Opt. 39, 5488 (2000)ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  1. 1.Graduate School of EngineeringThe University of Tokushima and JST-CRESTTokushimaJapan
  2. 2.Research Institute of Electronic ScienceHokkaido University and JST-CRESTSapporoJapan

Personalised recommendations