Applied Physics A

, Volume 81, Issue 7, pp 1411–1417 | Cite as

Effects of nitrogen doping on optical properties of TiO2 thin films

  • P.-G. Wu
  • C.-H. Ma
  • J.K. Shang


The potential for extending the optical absorption range of TiO2 by doping with nonmetallic elements was examined in nitrogen-containing TiO2 thin films. Thin films of TiO2-xNx were synthesized on glass and silicon substrates by ion-beam-assisted deposition to obtain a wide range of nitrogen concentrations. The compositions of the films were determined by Rutherford backscattering spectrometry and X-ray photoelectron spectroscopy. The structures of the films were analyzed by X-ray diffraction, transmission electron microscopy, and atomic force microscopy. The optical properties of the films were measured by UV-Vis spectroscopy and ellipsometry. A characteristic decreasing trend in band-gap values of the films was observed within a certain range of increasing dopant concentrations. As the nitrogen concentration increased, the structure of the films evolved from a well-defined anatase to deformed anatase. The reduced band gaps are associated with the N 2p orbital in the TiO2-xNx films.


Dopant Concentration TiO2 Thin Film Rutherford Backscattering Spectrometry Nitrogen Doping Anatase Structure 
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Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  1. 1.Department of Materials Science and EngineeringUniversity of Illinois at Urbana-ChampaignUrbanaUSA

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