Applied Physics A

, Volume 80, Issue 3, pp 493–496 | Cite as

Nanostructuring of surfaces by ultra-short laser pulses

  • K. Vestentoft
  • J.A. Olesen
  • B.H. Christensen
  • P. Balling
Rapid communication


Nanostructuring of an extended surface area is performed by ultra-short-pulse laser ablation in the low-fluence regime. A layer of micrometer-sized quartz spheres is used as a lens array in direct contact with the sample. The thickness of a transparent spacer layer under the spheres is adjusted so that the sample is struck by an array of well-focused spots. The threshold character of the ablation process allows the formation of sub-diffraction-limited structures, down to 500-nm holes with 800-nm light. The deposition of the lens array directly on the surface makes the technique broadly applicable, also to samples that show great variations in height.


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  1. 1.
    P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou: Opt. Commun. 114, 106 (1995)ADSCrossRefGoogle Scholar
  2. 2.
    K. Venkatakrishnan, B. Tan, P. Stanley, N.R. Sivakumar: J. Appl. Phys. 92, 1604 (2002)ADSCrossRefGoogle Scholar
  3. 3.
    P. Simon, J. Ihlemann: Appl. Surf. Sci. 109–110, 25 (1997)Google Scholar
  4. 4.
    J. Békési, J.-H. Klein-Wiele, P. Simon: Appl. Phys. A 76, 355 (2003)ADSGoogle Scholar
  5. 5.
    M.-H. Wu, G.M. Whitesides: Appl. Phys. Lett. 78, 2273 (2001)ADSCrossRefGoogle Scholar
  6. 6.
    M.-H. Wu, K.E. Paul, G.M. Whitesides: Appl. Opt. 41, 2575 (2002)ADSCrossRefGoogle Scholar
  7. 7.
    K. Piglmayer, R. Denk, D. Bäuerle: Appl. Phys. Lett. 80, 4693 (2002)ADSCrossRefGoogle Scholar
  8. 8.
    R. Denk, K. Piglmayer, D. Bäuerle: Appl. Phys. A 74, 825 (2002)ADSCrossRefGoogle Scholar
  9. 9.
    G. Wysocki, R. Denk, K. Piglmayer, N. Arhold, D. Bäuerle: Appl. Phys. Lett. 82, 692 (2003)ADSCrossRefGoogle Scholar
  10. 10.
    H.-J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, J. Boneberg: J. Microsc. 202, 129 (2001); H.-J. Münzer, M. Mosbacher, M. Bertsch, O. Dubbers, F. Burmeister, A. Pack, R. Wannemacher, B.-U. Runge, D. Bäuerle, J. Boneberg, P. Leiderer: Proc. SPIE 4426, 180 (2002)MathSciNetCrossRefGoogle Scholar
  11. 11.
    P.W. Barber, S.C. Hill: Light Scattering by Particles: Computational Methods (World Scientific, Singapore 1990)Google Scholar
  12. 12.
    S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling: J. Opt. Soc. Am. B 14, 2716 (1997)ADSCrossRefGoogle Scholar
  13. 13.
    A.E. Siegman: Lasers (University Science Books, Mill Valley, CA 1986)Google Scholar
  14. 14.
    S.M. Huang, M.H. Hong, B.S. Luk’yanchuk, Y.W. Zheng, W.D. Song, Y.F. Lu, T.C. Chong: J. Appl. Phys. 92, 2495 (2002)ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  • K. Vestentoft
    • 1
  • J.A. Olesen
    • 1
  • B.H. Christensen
    • 1
  • P. Balling
    • 1
  1. 1.Department of Physics and AstronomyUniversity of AarhusAarhus CDenmark

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