Applied Physics A

, Volume 79, Issue 4–6, pp 1587–1589 | Cite as

Pulsed laser deposition of metals in various inert gas atmospheres



The changes in the properties of laser deposited metal thin films were investigated in different inert gas atmospheres (He, Ne, Ar and Xe). With increasing inert gas pressure, the reduction of particle energy is accompanied by a strong increase of the deposition rate (especially in He atmosphere), a transition from compressive to tensile stress, and changes in structure and texture. This is explained by a reduction of surface mobility of the deposited particles, a decrease of implantation, resputtering and shot-peening effects. At high gas pressures, deposition conditions similar to sputtering or even thermal deposition are obtained.


Atmosphere Thin Film Pulse Laser Tensile Stress Deposition Rate 
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Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  1. 1.Institut für MaterialphysikUniversity of GöttingenGöttingenGermany
  2. 2.Nanofilm Technologie GmbHGöttingenGermany

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