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Applied Physics A

, Volume 79, Issue 4–6, pp 907–910 | Cite as

Pulsed laser deposition of PZT/Pt composite thin films with high dielectric constants

  • M.T.N. Pham
  • B.A. Boukamp
  • G. Rijnders
  • H.J.M. Bouwmeester
  • D.H.A. Blank
Article

Abstract

PbZr0.53Ti0.47O3 (PZT) thin films containing nanoparticles of Pt (3–10 nm) were produced using pulsed laser deposition (PLD). The Pt content can be tuned by varying the energy density of the laser beam. Phase and microstructure analysis of the thin films was performed using XRD, SEM, TEM and AFM. The electrical properties were investigated by C–V and I–V measurements. The effective dielectric constant of the composite films increased substantially through the Pt dispersion. These films are promising candidates, for instance, for high-density dynamic random access memory (DRAM) devices.

Keywords

Microstructure Thin Film Energy Density Dielectric Constant Pulse Laser 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  • M.T.N. Pham
    • 1
  • B.A. Boukamp
    • 1
  • G. Rijnders
    • 1
  • H.J.M. Bouwmeester
    • 1
  • D.H.A. Blank
    • 1
  1. 1.Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for NanotechnologyUniversity of TwenteEnschedeThe Netherlands

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