Pulsed laser deposition of PZT/Pt composite thin films with high dielectric constants
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PbZr0.53Ti0.47O3 (PZT) thin films containing nanoparticles of Pt (3–10 nm) were produced using pulsed laser deposition (PLD). The Pt content can be tuned by varying the energy density of the laser beam. Phase and microstructure analysis of the thin films was performed using XRD, SEM, TEM and AFM. The electrical properties were investigated by C–V and I–V measurements. The effective dielectric constant of the composite films increased substantially through the Pt dispersion. These films are promising candidates, for instance, for high-density dynamic random access memory (DRAM) devices.
KeywordsMicrostructure Thin Film Energy Density Dielectric Constant Pulse Laser
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