Metal/metal-oxide/metal etalon structures grown by pulsed laser deposition
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- Vainos, N., Tsigara, A., Manasis, J. et al. Appl. Phys. A (2004) 79: 1395. doi:10.1007/s00339-004-2791-y
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Multilayered metal/metal-oxide/metal structures are fabricated by pulsed laser deposition in alternating non-reactive and reactive oxidising conditions, by using pure metal targets. The variety of metals used includes tantalum, zinc and indium. Further to the well-known interferometric, etalon, optical behaviour the structures feature additional activation properties owing to the nanoscopic nature of the oxide materials incorporated.