Low-temperature growth of single-crystalline ZnO tubes on sapphire(0001) substrates
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Single-crystalline ZnO tubes were grown on sapphire(0001) substrates by metalorganic chemical vapor deposition at 400 °C. The growth temperature was much lower than that (900–1100 °C) used in previous reports. The tubes were grown along the substrate normal and were characterized by hexagon-shaped cross sections. All of the tubes possessed the same epitaxial relationships with respect to the substrate. Growth pressure was found to play an important role in the formation of ZnO tubes.
KeywordsSapphire Chemical Vapor Deposition Vapor Deposition Chemical Vapor Growth Temperature
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