Laser ablation of silicon and copper targets. Experimental and finite elements studies
The ablation process induced by excimer lasers is a collective phenomenon that basically involves two phenomena: the laser radiation–matter interaction and the dynamic of the ablation plume. The laser parameters, the thermal and optical properties of the material, and the surface morphology are critical factors in the ablation mechanisms affecting the direction of the ablation plume expansion. In this study, the role of the surface roughness and the evolution of its morphology under the laser irradiation were investigated. Assuming a thermal ablation model, a theoretical study of the initial steps of the laser ablation process by a finite element method using ANSYS (6.1) was performed. Different ablation experiments were carried out on silicon and copper targets using a XeCl laser. The target surface morphology changes were observed by SEM and the plume deflection was recorded by a digital camera. An acceptable agreement between the experimental and simulated results was found. This study contributes to a better understanding of the physical processes involved in the laser ablation and the relations between the plume deflection angle and the surface roughness.
Unable to display preview. Download preview PDF.
- 1.J.C. Miller, R.F. Haglund: Laser Ablation and Desorption (Academic Press, USA 1998)Google Scholar
- 2.D.B. Chrisey, G.K. Hubler (Eds): Pulsed Laser Deposition of Thin Films (John Wiley & Sons, New York 1994)Google Scholar
- 5.A. Perrone, A. Zocco, L. Cultrera, D. Guido, A. Forleo: Appl. Surf. Sci. 197–198, 251 (2002)Google Scholar
- 13.R. Kelly, A. Miotello: Appl. Surf. Sci. 96–98, 205 (1996)Google Scholar
- 14.A.M. Prokhorov, V.I. Konov, I. Ursu, I.N. Mihailescu: Laser Heating of Metals (Adam Hilger, Bristol 1990)Google Scholar
- 15.M.W. Chase, Jr.: NIST-JANAF Thermochemical Tables Fourth Edition (Published by the American Chemic al Society and the American Institute of Physics, USA 1998)Google Scholar
- 16.R.C. Weast: Handbook of Chemistry and Physics (CRC Press, USA 1976)Google Scholar
- 17.L. Ward: The Constants of the Materials and Films, Second Edition (IOP Publishing Ltd Institute of Physics, London 1994)Google Scholar
- 18.ANSYS®: Analysis Guides and others. First Edition (SAS IP, Inc.©)Google Scholar
- 19.J.C. Conde, F. Lusquiños, P. González, J. Serra, B. León, A. Dima, L. Cultrera, D. Guido, A. Zocco, A. Perrone: Thin Solid Films (2003) in pressGoogle Scholar