Applied Physics A

, Volume 79, Issue 4–6, pp 1005–1007 | Cite as

Pulsed laser deposition of metals: consequences of the energy distribution within the laser spot on film growth

  • J. Brandenburg
  • V. Neu
  • H. Wendrock
  • B. Holzapfel
  • H.-U. Krebs
  • S. Fähler
Article

Abstract

The strong influence of the lens position during pulsed laser deposition of metallic films is shown by measuring the energy distribution within the laser spot and its consequences for the deposition rate and kinetic energy of the deposited ions. This is analyzed together with the spot size and the dependence of the deposition rate on the overall laser energy .

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Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  • J. Brandenburg
    • 1
  • V. Neu
    • 1
  • H. Wendrock
    • 1
  • B. Holzapfel
    • 1
  • H.-U. Krebs
    • 2
  • S. Fähler
    • 1
  1. 1.IFW Dresden and SFB 463DresdenGermany
  2. 2.Institute for Materials Physics and SFB 345GöttingenGermany

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