Lateral resolving power of a time-of-flight photoemission electron microscope
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The lateral resolution of a time-of-flight photoemission electron microscope has been theoretically analyzed. It has been shown that the resolution limit can reach a few nanometers. The lateral resolution will be higher if the photoelectrons forming the image are characterized by a smaller acceptance angle obtained with the help of diaphragms in the crossover plane, a higher initial energy and a narrower interval of electron energies. The experimental results are in good agreement with the theoretical predictions.
KeywordsElectron Microscope Electron Energy Theoretical Prediction Initial Energy Resolution Limit
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