Abstract.
Detailed investigations of the possibilities for using femtosecond lasers for the nanostructuring of metal layers and transparent materials are reported. The aim is to develop a simple laser-based technology for fabricating two- and three-dimensional nanostructures with structure sizes on the order of several hundred nanometers. This is required for many applications in photonics, for the fabrication of photonic crystals and microoptical devices, for data storage, displays, etc. Measurements of thermionic electron emission from metal targets, which provide valuable information on the dynamics of femtosecond laser ablation, are discussed. Sub-wavelength microstructuring of metals is performed and the minimum structure size that can be fabricated in transparent materials is identified. Two-photon polymerization of hybrid polymers is demonstrated as a promising femtosecond laser-based nanofabrication technology.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
Author information
Authors and Affiliations
Additional information
Received: 20 November 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003
RID="*"
ID="*"Corresponding author. Fax: +49-511/2788-100, E-mail: ch@lzh.de
Rights and permissions
About this article
Cite this article
Korte, F., Serbin, J., Koch, J. et al. Towards nanostructuring with femtosecond laser pulses . Appl Phys A 77, 229–235 (2003). https://doi.org/10.1007/s00339-003-2110-z
Issue Date:
DOI: https://doi.org/10.1007/s00339-003-2110-z