Applied Physics A

, Volume 76, Issue 6, pp 983–985

Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC

  • N. Yasumaru
  • K. Miyazaki
  • J. Kiuchi
Rapid communication

DOI: 10.1007/s00339-002-1979-2

Cite this article as:
Yasumaru, N., Miyazaki, K. & Kiuchi, J. Appl Phys A (2003) 76: 983. doi:10.1007/s00339-002-1979-2


We report observation of nanostructures formed on thin TiN and DLC films that were irradiated by 800- and 267-nm, femtosecond (fs) Ti:sapphire laser pulses at an energy fluence slightly above the ablation threshold. On the ablated thin-film surfaces, the linearly polarized fs pulses produce arrays of fine periodic structures that are almost oriented to the direction perpendicular to the laser polarization, while the circularly polarized light forms fine-dot structures. The size of these surface structures is 1/10–1/5 of the laser wavelength and decreases with a decrease in the laser wavelength.

PACS: 61.80.Ba; 79.20.Ds; 42.62.Cf 

Copyright information

© Springer-Verlag 2002

Authors and Affiliations

  • N. Yasumaru
    • 1
  • K. Miyazaki
    • 2
  • J. Kiuchi
    • 3
  1. 1.Department of Mechanical Engineering, Fukui National College of Technology, Sabae, Fukui 916-8507, JapanJP
  2. 2.Institute of Advanced Energy, Kyoto University, Uji, Kyoto 611-0011, JapanJP
  3. 3.Eyetec Co. Ltd., Sabae, Fukui 916-0016, JapanJP

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