Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA)
- 121 Downloads
Wafer fabrication is one of the most complex and high competence manufacturing. How to fully utilize the machine capacity to meet customer demand is a very important topic. In this paper, we address the capacity allocation problem for photolithography area (CAPPA), which belongs to a capacity requirement planning scheme, with the process window and machine dedication restrictions that arise from an advanced wafer fabrication technology environment. Process window means that a wafer needs to be processed on machines that can satisfy its process capability (process specification). Machine dedication means that once the first critical layer of a wafer lot is processed on a certain machine, the subsequent critical layers of this lot must be processed on the same machine to ensure good quality of final products. We present six modified heuristics and a linear-programming-based heuristic algorithm (LPBHA) to solve the problem efficiently. The performance of the proposed algorithms is tested using real-world CAPPA cases taken from wafer fabrication photolithography area. Computational results show that LPBHA is the most effective one, and with a least average and a least standard deviation of deviation ratio of 0.294 and 0.085% compared to the lower bound of the CAPPA.
KeywordsPhotolithography area Process window Machine dedication Heuristic Linear programming
Unable to display preview. Download preview PDF.
- Akçalı E, Uzsoy R (2000) A sequential solution methodology for capacity allocation and lot scheduling problems for photolithography. In: 2000 IEEE/CPMT International Symposium on Electronics Manufacturing Technology, pp 374–381Google Scholar
- Chung SH, Huang HW (2001) Loading allocation algorithm with machine capability restriction for wafer fabrication factories. J Chin Inst Ind Eng 18(4):82–96Google Scholar
- Hung YF, Cheng GJ (2002) Hybrid capacity modeling for alternative machine types in linear programming production planning. IIE Trans 34(2):157–165Google Scholar
- ILOG Inc. (2001) ILOG OPL Studio 3.5. ILOG Inc., FranceGoogle Scholar
- Sule DR (1997) Industrial scheduling. PWS Publishing Company, Boston, pp 124–126Google Scholar