OR Spectrum

, Volume 30, Issue 3, pp 431–452 | Cite as

Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA)

  • Shu-Hsing ChungEmail author
  • Chun-Ying Huang
  • Amy H. I. Lee
Regular Article


Wafer fabrication is one of the most complex and high competence manufacturing. How to fully utilize the machine capacity to meet customer demand is a very important topic. In this paper, we address the capacity allocation problem for photolithography area (CAPPA), which belongs to a capacity requirement planning scheme, with the process window and machine dedication restrictions that arise from an advanced wafer fabrication technology environment. Process window means that a wafer needs to be processed on machines that can satisfy its process capability (process specification). Machine dedication means that once the first critical layer of a wafer lot is processed on a certain machine, the subsequent critical layers of this lot must be processed on the same machine to ensure good quality of final products. We present six modified heuristics and a linear-programming-based heuristic algorithm (LPBHA) to solve the problem efficiently. The performance of the proposed algorithms is tested using real-world CAPPA cases taken from wafer fabrication photolithography area. Computational results show that LPBHA is the most effective one, and with a least average and a least standard deviation of deviation ratio of 0.294 and 0.085% compared to the lower bound of the CAPPA.


Photolithography area Process window Machine dedication Heuristic Linear programming 


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Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  • Shu-Hsing Chung
    • 1
    Email author
  • Chun-Ying Huang
    • 2
  • Amy H. I. Lee
    • 3
  1. 1.Department of Industrial Engineering and ManagementNational Chiao Tung UniversityHsinchuTaiwan, ROC
  2. 2.Department of Business AdministrationChing Yun UniversityJungliTaiwan, ROC
  3. 3.Department of Industrial Engineering and System ManagementChung Hua UniversityHsinchuTaiwan, ROC

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