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Fresenius' Journal of Analytical Chemistry

, Volume 361, Issue 6–7, pp 642–645 | Cite as

Determination of the cubic to hexagonal structure transition in the metastable system TiN-AlN

  • R. Cremer
  • Mirjam Witthaut
  • Alexander von Richthofen
  • Dieter Neuschütz
Conference contribution

Abstract

Structural transitions of metastable Ti1–xAlxN coatings on technically relevant substrates were determined as a function of the Ti/Al ratio. Ti1–xAlxN films with different Ti/Al ratios were deposited on high speed steel (HSS) substrates at substrate temperatures of 300 ° and 500 °C by means of reactive magnetron sputtering ion plating (MSIP). A Ti/Al compound target was used as well as a cluster arrangement of one Ti and one Al target for comparison. The composition of the films was determined by electron probe microanalysis (EPMA), the crystallographic structure by thin film X-ray diffraction (XRD). The analyses revealed that films deposited with Ti/Al ratios of 44/56 and 36/64 had grown in cubic NaCl structure, a film with a Ti/Al ratio of 32/68 was two-phase, and a Ti/Al ratio of 25/75 led to a hexagonal film in wurtzite structure. Only small differences of the lattice parameters could be observed in dependence of temperature: At 300 °C the lattice parameters of the cubic structure corresponded exactly to Vegard‘s law, whereas they slightly decreased in the films deposited at 500 °C. The application of a cluster arrangement instead of a compound target resulted in nearly the same lattice parameters and peak shapes.

Keywords

Hexagonal Substrate Temperature Structural Transition Wurtzite Compound Target 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1998

Authors and Affiliations

  • R. Cremer
    • 1
  • Mirjam Witthaut
    • 1
  • Alexander von Richthofen
    • 1
  • Dieter Neuschütz
    • 1
  1. 1.Lehrstuhl für Theoretische Hüttenkunde, Rheinisch-Westfälische Technische Hochschule, D-52056 Aachen, GermanyDE

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