Investigation on modified jet electrochemical machining of micro-channel

  • X. L. ChenEmail author
  • B. Y. Dong
  • G. C. Fan
  • C. Y. Zhang
  • J. W. LiuEmail author
  • Y. J. Zhang
  • Z. N. Guo


Micro-channels have been widely used in variety of devices including bipolar plate, micro-chemical reactor, and micro-heat pipe. Electrochemical machining (ECM) is a promising approach to manufacture such structure on metallic surface. This paper proposed a modified jet-ECM for generating micro-channels. A flexible insulated mask with micro-through-holes was covered on the head surface of a metallic nozzle. During machining, the mask on the modified nozzle was contacted with the workpiece, and the jetting electrolyte in the nozzle was divided into different machining regions by the micro-through-holes in the mask; then, the micro-channels could be generated by moving the workpiece with an effective voltage applied between the nozzle and workpiece. Compared with traditional jet-ECM, the machining region in this method could be confined by the micro-through-hole, which was efficient for generating channel in micro-scale. In addition, multiple micro-channels could be generated by using a mask with a single row of micro-through-holes rather than assembling multiple nozzles. The experimental results showed that the pulse duty cycle has a significant influence on the dimension of micro-channel, while the pulse frequency has slight influence in contrast. In addition, the material removal rate (MRR), effective material removal rate (MRRe), and current efficiency (CE) were investigated with different machining parameters. The results indicated that although MRR was increased with the increasing pulse duty cycle, both MRRe and CE were reduced, leading to a deviation between the theory and experiment. The moving speed of workpiece also has a significant influence on CE. Increasing moving speed was useful for enhancing the CE, from 0.48 to 0.66 with the moving speed increasing from 20 to 80 μm/s. Finally, several kinds of micro-channels such as multiple micro-channels, micro-reactor, and cross micro-channels were well manufactured with this method, demonstrating a flexible and efficient process.


Micro-channel Electrochemical machining Modified jet-ECM Material removal rate Current efficiency 


Funding information

The work described in this study was supported by the National Natural Science Foundation of China (Grant No. 51705089), the Pearl River S&T Nova Program of Guangzhou (201906010099), and Joint Funds of the National Natural Science Foundation of China and Guangdong Province (Grant No. U1601201).


  1. 1.
    Lee SJ, Lee CY, Yang KT, Kuan FH, Lai PH (2008) Simulation and fabrication of micro-scaled flow channels for metallic bipolar plates by the electrochemical micromachining process. J Power Sources 185:1115–1121CrossRefGoogle Scholar
  2. 2.
    Won JY, Jun HK, Jeon MK, Woo SI (2006) Performance of microchannel reactor combined with combustor for methanol steam reforming. Catal Today 111(3–4):158–163CrossRefGoogle Scholar
  3. 3.
    Tang H, Tang Y, Wan ZP, Li J, Yuan W, Lu LS, Li Y, Tang KR (2018) Review of applications and developments of ultra-thin micro heat pipes for electronic cooling. Appl Energy 223:383–400CrossRefGoogle Scholar
  4. 4.
    Karbasian H, Tekkaya AE (2010) A review on hot stamping. J Mater Process Technol 210:2103–2118CrossRefGoogle Scholar
  5. 5.
    Shen XH, Tao GC (2015) Tribological behaviors of two micro textured surfaces generated by vibrating milling under boundary lubricated sliding. Int J Adv Manuf Technol 79(9–12):1995–2002CrossRefGoogle Scholar
  6. 6.
    Hung JC, Chang DH, Chuang Y (2012) The fabrication of high-aspect-ratio microflow channels on metallic bipolar plates using die-sinking micro-electrical discharge machining. J Power Sources 198:158–163CrossRefGoogle Scholar
  7. 7.
    Schreck S, Zum GKH (2005) Laser-assisted structuring of ceramic and steel surfaces for improving tribological properties. Appl Surf Sci 247:616–622CrossRefGoogle Scholar
  8. 8.
    Yu J, Zeng YB, Zhu D (2018) Wire electropolishing of microgroove structures on a cobalt-based alloy. Int J Adv Manuf Technol 96(9–12):3619–3631CrossRefGoogle Scholar
  9. 9.
    Ming PM, Zhao CH, Zhang XM, Li XC, Qin G, Yan L (2018) Investigation of foamed cathode through-mask electrochemical micromachining developed for uniform texturing on metallic cylindrical surface. Int J Adv Manuf Technol 96(9–12):3043–3056CrossRefGoogle Scholar
  10. 10.
    Baldhoff T, Nock V, Marshall AT (2017) Through-mask electrochemical micromachining of aluminum in phosphoric acid. J Electrochem Soc 164(9):E194–E202CrossRefGoogle Scholar
  11. 11.
    Hao X, Wang L, Wang Q, Guo F, Tang Y, Ding Y, Lu B (2011) Surface micro-texturing of metallic cylindrical surface with proximity rolling-exposure lithography and electrochemical micromachining. Appl Surf Sci 257:8906–8911CrossRefGoogle Scholar
  12. 12.
    Nouraei S, Roy S (2008) Electrochemical process for micropattern transfer without photolithography: a modeling analysis. J Electrochem Soc 155(2):D97–D103CrossRefGoogle Scholar
  13. 13.
    Ghoshal B, Bhattacharyya B (2013) Influence of vibration on micro-tool fabrication by electrochemical machining. Int J Mach Tools Manuf 64:49–59CrossRefGoogle Scholar
  14. 14.
    Hackert-Oschätzchen M, Meichsner G, Zinecker M, Martin A, Schubert A (2012) Micro machining with continuous electrolytic free jet. Precis Eng 36:612–619CrossRefGoogle Scholar
  15. 15.
    Natsu W, Ikeda T, Kunieda M (2007) Generating complicated surface with electrolyte jet machining. Precis Eng 31:33–39CrossRefGoogle Scholar
  16. 16.
    Ikeda T, Natsu W, Kunieda M (2006) Electrolyte jet machining using multiple nozzles. Int J Electr Mach 11:25–32CrossRefGoogle Scholar
  17. 17.
    Mithu MAH, Fantoni G, Ciampi J (2011) The effect of high frequency and duty cycle in electrochemical microdrilling. Int J Adv Manuf Technol 55(9–12):923–933Google Scholar
  18. 18.
    Qu N, Chen X, Li H, Zhu D (2014) Fabrication of PDMS micro through-holes for electrochemical micromachining. Int J Adv Manuf Technol 72(1–4):487–494CrossRefGoogle Scholar
  19. 19.
    Wang GQ, Zhu D, Li HS (2018) Fabrication of semi-circular micro-groove on titanium alloy surface by through-mask electrochemical micromachining. J Mater Process Technol 258:22–28CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2019

Authors and Affiliations

  1. 1.School of Electro-mechanical EngineeringGuangdong University of TechnologyGuangzhouPeople’s Republic of China
  2. 2.Guangzhou Key Laboratory of Nontraditional Machining and EquipmentGuangzhouPeople’s Republic of China

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