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High-performance graphene-based heaters fabricated using maskless ultraviolet laser patterning

  • Shih-Feng TsengEmail author
  • Pi-Ying Cheng
  • Wen-Tse Hsiao
  • Ming-Fu Chen
  • Chien-Kai Chung
  • Po-Han Wang
ORIGINAL ARTICLE
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Abstract

Graphene-based film heaters (GFHs) with laser-patterned electrode structures can be used in microheaters, thermal sensors, and thermostatic apparatuses for various high-value-added medical devices and creative products. To obtain uniform and higher temperatures, this study aims to design, fabricate, and measure GFHs with net-like electrode structures using ANSYS Workbench software, an ultraviolet laser processing system, and an infrared thermal imaging camera, respectively. The electric heating experiments (which were measured with an infrared thermal imaging camera) demonstrated that the temperatures of GFHs with net-like electrode structures were significantly higher than those of devices without patterned graphene films. Moreover, the temperatures of GFHs with net-like electrode structures increased rapidly with time when DC voltages higher than 12 V were applied for at least 10 s. A maximum temperature of 91.5 °C was obtained at 200 s when a DC voltage of 18 V was applied. Besides, minimal and maximal deviations of steady-state temperatures between experimental and simulated values were 6.9 °C and 10 °C under each corresponding DC voltage, respectively.

Keywords

Graphene-based film heater Net-like electrode Ultraviolet laser Infrared thermal imaging camera Electric heating 

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Notes

Funding information

This research was financially supported by the Ministry of Science and Technology of Taiwan under projects MOST 107-2221-E-027-129-MY2 and MOST 107-2622-E-019-CC3.

References

  1. 1.
    Denlinger DW, Abarra EN, Allen K, Rooney PW, Messer MT, Watson SK, Hellman F (1994) Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K. Rev Sci Instrum 65:946–959CrossRefGoogle Scholar
  2. 2.
    Semancik S, Cavicchi RE, Wheeler MC, Tiffany JE, Poirier GE, Walton RM, Suehle JS, Panchapakesan B, DeVoe DL (2001) Microhotplate platforms for chemical sensor research. Sens Actuators B Chem 77:579–591CrossRefGoogle Scholar
  3. 3.
    Barrettino D, Graf M, Song WH, Kirstein KU, Hierlemann A, Baltes H (2004) Hotplate-basedmonolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500°C. IEEE J Solid State Circuits 39:1202–1207CrossRefGoogle Scholar
  4. 4.
    Jung D, Kim D, Lee KH, Overzet LJ, Lee GS (2013) Transparent film heaters using multi-walled carbon nanotube sheets. Sens Actuators A Phys 199:176–180CrossRefGoogle Scholar
  5. 5.
    Scorzoni A, Caputo D, Petrucci G, Placidi P, Zampolli S, Cesare G, Tavernelli M, Nascetti A (2015) Design and experimental characterization of thin film heaters on glass substrate for lab-on-Chip applications. Sens Actuators A Phys 229:203–210CrossRefGoogle Scholar
  6. 6.
    An JE, Jeong YG (2013) Structure and electric heating performance of graphene/epoxy composite films. Eur Polym J 49:1322–1330CrossRefGoogle Scholar
  7. 7.
    Park SC, Kim JM, Kim T, Kim MH, Ahn HS (2016) Boiling characteristics on a serpentine-like geometry thin-film platinum heater under pool boiling. Int J Heat Mass Transf 95:214–223CrossRefGoogle Scholar
  8. 8.
    Adera S, Antao D, Raj R, Wang EN (2016) Design of micropillar wicks for thin-film evaporation. Int J Heat Mass Transf 101:280–294CrossRefGoogle Scholar
  9. 9.
    Khaligh HH, Xu L, Khosropour A, Madeira A, Romano M, Pradére C, Tréguer-Delapierre M, Servant L, Pope MA, Goldthorpe IA (2017) The joule heating problem in silver nanowire transparent electrodes. Nanotechnology 28:425703CrossRefGoogle Scholar
  10. 10.
    Dunst K, Jurków D, Jasiński P (2016) Laser patterned platform with PEDOT-graphene composite film for NO2 sensing. Sens Actuators B Chem 229:155–165CrossRefGoogle Scholar
  11. 11.
    Lu P, Cheng F, Ou Y, Lin M, Su L, Chen S, Yao X, Liu D (2017) A flexible and transparent thin film heater based on a carbon fiber /heat-resistant cellulose composite. Compos Sci Technol 153:1–6CrossRefGoogle Scholar
  12. 12.
    Jayathilake DSY, Sagu JS, Wijayantha KGU (2019) Transparent heater based on Al,Ga co-doped ZnO thin films. Mater Lett 237:249–252CrossRefGoogle Scholar
  13. 13.
    Seok HJ, Jang HW, Lee DY, Son BG, Kim HK (2019) Roll-to-roll sputtered, indium-free ZnSnO/AgPdCu/ZnSnO multi-stacked electrodes for high performance flexible thin-film heaters and heat-shielding films. J Alloys Compd 775:853–864CrossRefGoogle Scholar
  14. 14.
    Creemer JF, Briand D, Zandbergen HW, Vlist W, Boer CR, Rooij NF, Sarro PM (2008) Microhotplates with TiN heaters. Sens Actuators A Phys 148:416–421CrossRefGoogle Scholar
  15. 15.
    Hwang IS, Lee EB, Kim SJ, Choi JK, Cha JH, Lee HJ, Ju BK, Lee JH (2011) Gas sensing properties of SnO2 nanowires on micro-heater. Sens Actuators B Chem 154:295–300CrossRefGoogle Scholar
  16. 16.
    Wyzkiewicz I, Grabowska I, Chudy M, Brzozka Z, Jakubowska M, Wisniewski T, Dybko A (2006) Self-regulating heater for microfluidic reactors. Sens Actuators B Chem 114:893–896CrossRefGoogle Scholar
  17. 17.
    Cheong HG, Kim JH, Song JH, Jeong U, Park JW (2015) Highly flexible transparent thin film heaters based on silver nanowires and aluminum zinc oxides. Thin Solid Films 589:633–641CrossRefGoogle Scholar
  18. 18.
    Tseng SF, Hsiao WT, Cheng PY, Lin YS, Chang TL, Chung CK (2017) Laser structuring of parallel electrode array on graphene/glass substrates for rapid inspections of moisturizing efficacy. Int J Adv Manuf Technol 91:3663–3671CrossRefGoogle Scholar
  19. 19.
    Tseng SF, Chen MF, Hsiao WT, Huang CY, Yang CH, Chen YS (2014) Laser micromilling of convex microfluidic channels onto glassy carbon for glass molding dies. Opt Lasers Eng 57:58–63CrossRefGoogle Scholar
  20. 20.
    Tseng SF, Hsiao WT, Chung CK, Chang TL (2015) Investigation the interaction between the pulsed ultraviolet laser beams and PEDOT:PSS/graphene composite films. Appl Surf Sci 356:486–491CrossRefGoogle Scholar
  21. 21.
    Nguyen VT, Le HD, Nguyen VC, Ngo TTT, Le DQ, Nguyen XN, Phan NM (2013) Synthesis of multi-layer graphene films on copper tape by atmospheric pressure chemical vapor deposition method. Adv Nat Sci Nanosci Nanotechnol 4:035012CrossRefGoogle Scholar
  22. 22.
    Reina A, Jia XT, Ho J, Nezich D, Son HB, Bulovic V, Dresselhaus MS, Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett 9:30–35CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2019

Authors and Affiliations

  • Shih-Feng Tseng
    • 1
    Email author
  • Pi-Ying Cheng
    • 2
  • Wen-Tse Hsiao
    • 3
  • Ming-Fu Chen
    • 3
  • Chien-Kai Chung
    • 3
  • Po-Han Wang
    • 2
  1. 1.Department of Mechanical EngineeringNational Taipei University of TechnologyTaipeiTaiwan
  2. 2.Department of Mechanical EngineeringNational Chiao Tung UniversityHsinchuTaiwan
  3. 3.Instrument Technology Research Center, National Applied Research LaboratoriesHsinchuTaiwan

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