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Repulsive magnetic field–assisted laser-induced plasma micromachining for high-quality microfabrication

  • Hongwei Tang
  • Pei Qiu
  • Ruixing Cao
  • Jianlin Zhuang
  • Shaolin XuEmail author
ORIGINAL ARTICLE
  • 33 Downloads

Abstract

Surface micro-/nanostructures are widely used in the fabrication of various functional microsystems. Laser-induced plasma micromachining can greatly improve surface quality in terms of recast layers and thermal defects compared with laser direct writing. Magnetic field has the ability to constrain plasma diffusion and can ensure the stability of laser-induced plasma processing. This paper compares the effects of laser direct–writing processing and laser-induced plasma processing of single-crystal silicon at the micro-/nanoscale, and emphatically analyzes the material removal mechanism of repulsive magnetic field–assisted laser-induced plasma micromachining. It is shown that the volume of the laser-induced plasma was constrained under the influence of Lorentz force, a high-quality smooth microgroove without thermal defects was obtained, and its line width was reduced by 30%.

Keywords

Micro-/nanofabrication Laser-induced plasma micromachining Magnetic confinement Thermal defects 

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Notes

Funding information

This work in the present research was supported by the National Natural Science Foundation of China (Grant No. 51705233) and Shenzhen Key Laboratory for Additive Manufacturing of High-performance Materials.

References

  1. 1.
    Pecholt B, Vendan M, Dong Y, Molian Y (2008) Ultrafast laser micromachining of 3c-sic thin films for mems device fabrication. Int J Adv Manuf Technol 39:239–250CrossRefGoogle Scholar
  2. 2.
    Simsek E, Pecholt B, Everson C, Molian P (2010) High-pressure deflection behavior of laser micromachined bulk 6h-sic mems sensor diaphragms. Sensors Actuators A Phys 162(1):29–35CrossRefGoogle Scholar
  3. 3.
    Deng D, Xie Y, Chen L, Chen X (2018) Experimental investigation on laser micro-milling of SIC microchannels. Int J Adv Manuf Technol.  https://doi.org/10.1007/s00170-018-2800-5
  4. 4.
    Ju Y, Liao Y, Zhang L, Sheng Y, Zhang Q, Chen D (2011) Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining. Microfluid Nanofluid 11(1):111–117CrossRefGoogle Scholar
  5. 5.
    Wang H, Zhang YL, Wang W, Ding H, Sun HB (2017) On-chip laser processing for the development of multifunctional microfluidic chips. Laser Photonics Rev 11(2):1600116CrossRefGoogle Scholar
  6. 6.
    Murzin SP, Balyakin VB (2017) Microstructuring the surface of silicon carbide ceramic by laser action for reducing friction losses in rolling bearings. Opt Laser Technol 88:96–98CrossRefGoogle Scholar
  7. 7.
    Hao X, Cui W, Li L, Li H, Khan AM, He N (2018) Cutting performance of textured polycrystalline diamond tools with composite lyophilic/lyophobic wettabilities. J Mater Process Technol 260:1–8CrossRefGoogle Scholar
  8. 8.
    Xiao S, Hao X, Yang Y, Li L, He N (2019) Feasible fabrication of a wear-resistant hydrophobic surface [J]. Appl Surf Sci 463:923–930CrossRefGoogle Scholar
  9. 9.
    Brown MS, Arnold CB (2010) Fundamentals of laser-material interaction and application to multiscale surface modification. Springer, BerlinCrossRefGoogle Scholar
  10. 10.
    Hong M (2010) Laser-material interaction and its applications in surface micro−/nanoprocessing. AIP Conf Proc 1278:293–302Google Scholar
  11. 11.
    Gong H, Li CF, Li ZY (1999) CW-laser-induced thermal and mechanical damage in optical materials. Proc SPIE 3578:576–584CrossRefGoogle Scholar
  12. 12.
    Yamada K, Ueda T, Ookawa A, Ane Y, Eiya K (2006) Thermal damage of silicon wafer in thermal cleaving process with pulsed laser and CW laser. Proc SPIE 6107:61070H-61070H-10Google Scholar
  13. 13.
    Liu H, Chen F, Wang X, Yang Q, Bian H, Hou X (2010) Influence of liquid environments on femtosecond laser ablation of silicon. Thin Solid Films 518:5188–5194CrossRefGoogle Scholar
  14. 14.
    Charee W, Tangwarodomnukun V, Dumkum C (2015) Laser ablation of silicon in water under different flow rates. Int J Adv Manuf Technol 78:19–29CrossRefGoogle Scholar
  15. 15.
    Saxena I, Ehmann KF (2014) Multimaterial capability of laser induced plasma micromachining. J Micro Nano-Manuf 2:031005CrossRefGoogle Scholar
  16. 16.
    Pallav K, Ehmann KF (2010) Feasibility of laser induced plasma micro-machining (LIP-MM). IFIP AICT 315:73–80Google Scholar
  17. 17.
    Pallav K, Han P, Ramkumar J, Ehmann KF (2011) Comparative assessment of the laser induced plasma micro-machining (LIPMM) and the micro-EDM processes. ASME Conf Proc 2011:429–442Google Scholar
  18. 18.
    Saxena I, Malhotra R, Ehmann K, Cao J (2015) High-speed fabrication of microchannels using line-based laser induced plasma micromachining. J Micro Nano-Manuf 3:021006CrossRefGoogle Scholar
  19. 19.
    Pallav K, Ehmann KF (2010) Laser induced plasma micro-machining. ASME Conf Proc 2010:363–369Google Scholar
  20. 20.
    Kennedy PK, Boppart SA, Hammer DX, Rockwell BA, Noojin GD, Roach WP (1995) A first-order model for computation of laser-induced breakdown thresholds in ocular and aqueous media. IEEE J Quantum Electron 31:2250–2257CrossRefGoogle Scholar
  21. 21.
    Liu X, Du D, Mourou G (1997) Laser ablation and micromachining with ultrashort laser pulses. IEEE J Quantum Electron 33:1706–1716CrossRefGoogle Scholar
  22. 22.
    Sacchi CA (1991) Laser-induced electric breakdown in water. J Opt Soc Am B 8:337–345MathSciNetCrossRefGoogle Scholar
  23. 23.
    Mason KJ, Goldberg JM (1987) Production and initial characterization of a laser-induced plasma in a pulsed magnetic field for atomic spectrometry. Anal Chem 59:313–316CrossRefGoogle Scholar
  24. 24.
    Saxena I, Wolff S, Cao J (2015) Unidirectional magnetic field assisted laser induced plasma micro-machining. Manuf Lett 3:1–4CrossRefGoogle Scholar
  25. 25.
    Wolff S, Saxena I (2014) A preliminary study on the effect of external magnetic fields on laser-induced plasma micromachining (LIPMM). Manuf Lett 2:54–59CrossRefGoogle Scholar
  26. 26.
    Mostovych AN, Ripin BH, Stamper JA (1989) Laser produced plasma jets: collimation and instability in strong transverse magnetic fields. Phys Rev Lett 62:2837–2840CrossRefGoogle Scholar
  27. 27.
    Vogel A, Noack J, Nahen K, Theisen D, Busch S, Parlitz U (1999) Energy balance of optical breakdown in water at nanosecond to femtosecond time scales. Appl Phys B Lasers Opt 68:271–280CrossRefGoogle Scholar
  28. 28.
    Wu J, Wen M, Li N (2012) Analysis of the relationship between incident laser intensity and the parameters of LSDW. Proc SPIE.  https://doi.org/10.1117/12.2011251
  29. 29.
    Li Q, Hong Y, Ye J, Wen M, Wang G (2010) Study of the velocity of a laser supported detonation wave. Laser Eng 19:153–161Google Scholar
  30. 30.
    Koopman DW (1976) High-beta effects and anomalous diffusion in plasmas expanding into magnetic fields. Phys Fluids 19:670–674CrossRefGoogle Scholar
  31. 31.
    Rai VN, Rai AK, Yueh FY, Singh JP (2003) Optical emission from laser-induced breakdown plasma of solid and liquid samples in the presence of a magnetic field. Appl Opt 42:2085–2093CrossRefGoogle Scholar
  32. 32.
    Hussain A, Li Q, Hao ZQ (2015) The effect of an external magnetic field on the plume expansion dynamics of laser-induced aluminum plasma. Plasma Sci Technol 17:693–698CrossRefGoogle Scholar
  33. 33.
    Huba JD, Hassam AB, Winske D (1990) Stability of sub-Alfvénic plasma expansions. Phys Fluids 2:1676–1697CrossRefGoogle Scholar
  34. 34.
    Rai VN, Shukla M, Pant HC (1999) An x-ray biplanar photodiode and the x-ray emission from magnetically confined laser produced plasma. Pramana 52:49–65CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2019

Authors and Affiliations

  1. 1.Department of Mechanical and Energy EngineeringSouthern University of Science and TechnologyShenzhenChina

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