Repulsive magnetic field–assisted laser-induced plasma micromachining for high-quality microfabrication

  • Hongwei Tang
  • Pei Qiu
  • Ruixing Cao
  • Jianlin Zhuang
  • Shaolin XuEmail author


Surface micro-/nanostructures are widely used in the fabrication of various functional microsystems. Laser-induced plasma micromachining can greatly improve surface quality in terms of recast layers and thermal defects compared with laser direct writing. Magnetic field has the ability to constrain plasma diffusion and can ensure the stability of laser-induced plasma processing. This paper compares the effects of laser direct–writing processing and laser-induced plasma processing of single-crystal silicon at the micro-/nanoscale, and emphatically analyzes the material removal mechanism of repulsive magnetic field–assisted laser-induced plasma micromachining. It is shown that the volume of the laser-induced plasma was constrained under the influence of Lorentz force, a high-quality smooth microgroove without thermal defects was obtained, and its line width was reduced by 30%.


Micro-/nanofabrication Laser-induced plasma micromachining Magnetic confinement Thermal defects 


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Funding information

This work in the present research was supported by the National Natural Science Foundation of China (Grant No. 51705233) and Shenzhen Key Laboratory for Additive Manufacturing of High-performance Materials.


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Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2019

Authors and Affiliations

  1. 1.Department of Mechanical and Energy EngineeringSouthern University of Science and TechnologyShenzhenChina

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