Effect of pad wear on tool influence function in robotic polishing of large optics
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Robotic polishing can greatly improve the manufacturing efficiency of precision optics, and its tool influence function (TIF) needs to be modeled precisely for deterministic fabrication. When polishing large optics, the TIFs are significantly affected by the wear of the polishing pad, which in turn will change the material removal rate. In this paper, the generating mechanism of the pad wear is analyzed, so as to quantitatively predict the wear amount of the polishing pad under different processing parameters; consequently, the TIF error caused by pad wear can be compensated. The experimental results demonstrate that the proposed model can reliably predict the polishing pad shape and the corresponding TIF after different wearing time; henceforth, the resulting form quality and convergence rate of robotic polishing can be significantly improved.
KeywordsOptics fabrication Robot Polishing Pad wear Tool influence function
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This study received financial support from the Science Challenging Program (JCKY2016212A506-0106), National Natural Science Foundation of China (51875107), National Key Research and Development Program of China (2017YFB1104700), and European Horizon 2020 EMPIR project (15SIB01 FreeFORM).
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