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Influence of diamond tool chamfer angle on surface integrity in ultra-precision turning of singe crystal silicon

  • Yigit KarpatEmail author
ORIGINAL ARTICLE
  • 41 Downloads

Abstract

Ultra precision diamond machining enables the economical production of freeform optics on infrared materials such as silicon. To produce optics with acceptable surface integrity, it is important to have a good understanding of process-work material interaction between diamond tool and brittle and hard single crystal IR materials. Chamfered cutting edges are known to have high strength, which makes them suitable for machining difficult-to-cut materials. This study investigates the influence of chamfer angle on the surface integrity of silicon. Diamond tool chamfer angles of − 20°, − 30°, and − 45° are considered under practical diamond turning conditions of single crystal silicon. State-of-the-art techniques were used to investigate the surface integrity of the machined silicon surfaces. The results show that chamfer angle of 30° yields more favorable results compared to 20° and 45° under the conditions tested. The results indicate the complex interplay between tool geometry and process parameters in reaching an acceptable level of surface integrity. A machinability map indicating ductile and brittle machining conditions for 30° chamfered diamond tool has been presented which includes directly transferable knowledge to the precision machining industry.

Keywords

Diamond machining Surface integrity Silicon Phase transformation 

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Notes

Acknowledgments

The author would like to thank the Ministry of Development of Turkey (HAMIT-Micro System Design and Manufacturing Research Centre).

Funding information

This work was financially supported by the Turkish Scientific and Technological Research Council of Turkey (TUBITAK) through project 115M699.

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Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2018

Authors and Affiliations

  1. 1.Department of Industrial EngineeringBilkent UniversityAnkaraTurkey
  2. 2.Department of Mechanical EngineeringBilkent UniversityAnkaraTurkey
  3. 3.UNAM-National Nanotechnology Research Center and Institute of Materials Science and NanotechnologyBilkent UniversityAnkaraTurkey

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