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Precision turning of optical mandrel with high steepness axisymmetric aspheric surface using arc-edged diamond cutter

  • Tao Sun
  • Fanxing Kong
  • Yanquan GengEmail author
  • Quanquan HanEmail author
ORIGINAL ARTICLE
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Abstract

It continues to be a challenge in machining the optical mandrel with high steepness axisymmetric aspheric surface due to the high machining cost. In this study, a novel approach which uses the arc-edged diamond cutter tangent to workpiece’s meridian profile curve at the interpolation points in “XZ” 2-axis machine tool is proposed. The mathematical model is established and the maximum of rough interpolation error that is generated using this method is also calculated. The number of rough interpolation segments and coordinates of the cutter center motion trajectory are determined when the maximum rough interpolation error is less than the allowable value of the given error. It analyzes the interpolation trajectory and interpolation error to determine the position and numerical value with the maximum rough interpolation error, as well as the correlation between the interpolation error and the number of interpolation points. The experimental results show that this method could generate smaller dimensional and form error compared to traditional 2-axis contouring approach method. In addition, compared to using multi-axis ultraprecision computer numerically controlled (CNC) lathe with the B-axis, processing of high steepness aspheric in “XZ” 2-axis lathe greatly reduces the cost. This method can thus be used for precision turning of Wolter type-I extreme ultraviolet (EUV) replication mandrel with high steepness aspheric surface.

Keywords

High steepness Axisymmetric aspheric surface Arc-edged diamond cutter Precise turning Optical mandrel 

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Copyright information

© Springer-Verlag London Ltd. 2017

Authors and Affiliations

  1. 1.Center for Precision EngineeringHarbin Institute of TechnologyHarbinChina
  2. 2.College of Mechanical and Electrical EngineeringJilin Institute of Chemical TechnologyJilinChina
  3. 3.School of EngineeringCardiff UniversityCardiffUK

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