A theoretical analysis and experimental verification of a laser drilling process for a ceramic substrate

  • Ming-Fei Chen
  • Wen-Tse HsiaoEmail author
  • Ming-Cheng Wang
  • Kai-Yu Yang
  • Ying-Fang Chen


This paper reports theoretical and experimental methods for drilling alumina ceramic substrates by using a nanosecond-pulsed ultraviolet laser. A physical model was established using ANSYS parameter design language finite element software. The influence of laser parameters, such as laser fluence, number of pulses and its duration, and frequency, on morphology—depth, diameter, taper, and temperature distribution—was investigated using three-dimensional confocal laser scanning microscopy. Simulation and experimental results reveal that higher laser fluence and number of pulses produces larger drilling depths and diameters. Laser fluence, pulse duration, frequency, and pulse number of 5.10 J/cm2, 1000 μs, 20 kHz, and >9, respectively, can successfully drill through the alumina ceramic substrate. Pulse duration between 3 and 8 ms yielded the smallest hole taper.


Al2O3 ceramic Nanosecond-pulsed ultraviolet laser Temperature distribution 


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Copyright information

© Springer-Verlag London 2015

Authors and Affiliations

  • Ming-Fei Chen
    • 1
  • Wen-Tse Hsiao
    • 2
    Email author
  • Ming-Cheng Wang
    • 1
  • Kai-Yu Yang
    • 1
  • Ying-Fang Chen
    • 1
  1. 1.Department of Mechatronics EngineeringNational Changhua University of EducationChanghuaTaiwan
  2. 2.Instrument Technology Research CenterNational Applied Research LaboratoriesHsinchuTaiwan

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