Deterministic fabrication of nanostructures for plasmonic lens by focused ion beam

  • Xichun Luo
  • Jining Sun
  • James M. Ritchie
  • Wenlong Chang
  • Wei Wang
ORIGINAL ARTICLE

Abstract

Plasmonic lens is a key component in the development of sub-wavelength resolution optical system for bio-imaging and nanolithography applications. In order to develop a deterministic fabrication capability for nanostructures on plasmonic lens by using focused ion beam, this paper presents a highly robust and accurate surface topography model based on level set method. Sputtered atom distribution and angular dependence of sputter yield are calculated by Monte Carlo simulation programs SRIM/TRIM and TRIDYN, respectively. Redeposition effect is included in the physical model and successfully embedded into a topography simulation program by applying the level set method. The proposed model is validated and evaluated in the focused ion beam fabrication experiments. Simulation error of less than 7% is obtained. Two types of nanostructures for plasmonic lens were fabricated using the machining parameters approved by this simulation model. Simulation errors of 7 and 2 nm were found in a nanodots array and a spiral Bragg grating, respectively. The results clearly demonstrate the effectiveness of the modelling approach developed for deterministic fabrication of nanostructures.

Keywords

Focused ion beam Nanostructures Plasmonic lens Level set method Surface topography 

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References

  1. 1.
    Nie S, Emory SR (1997) Probing single molecules and single nanoparticles by surface-enhanced Raman scattering. Science 275(5303):1102CrossRefGoogle Scholar
  2. 2.
    Liu Z, Fang N, Yen TJ, Zhang X (2003) Rapid growth of evanescent wave by a silver superlens. Appl Phys Lett 83:5184CrossRefGoogle Scholar
  3. 3.
    Kneipp K, Wang Y, Kneipp H, Perelman L, Itzkan I, Dasari R, Feld M (1997) Single molecule detection using surface-enhanced Raman scattering (SERS). Phys Rev Lett 78(9):1667–1670CrossRefGoogle Scholar
  4. 4.
    Ziegler J (2004) SRIM-2003. Nucl Instrum Methods Phys Res Sect B 219:1027–1036CrossRefGoogle Scholar
  5. 5.
    Möller W, Eckstein J (1988) Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids. Comput Phys Commun 51(3):355–368CrossRefGoogle Scholar
  6. 6.
    Möller W, Eckstein W (1984) Tridyn—a TRIM simulation code including dynamic composition changes. Nucl Instrum Methods Phys Res Sect B 2(1–3):814–818CrossRefGoogle Scholar
  7. 7.
    Boxleitner W, Hobler G (2001) FIBSIM—dynamic Monte Carlo simulation of compositional and topography changes caused by focused ion beam milling. Nuclear Inst and Methods in Physics Research, B 180(1–4):125–129CrossRefGoogle Scholar
  8. 8.
    Sethian J (2000) Level set methods and fast marching methods: evolving interfaces in computational geometry, fluid mechanics, computer vision, and materials science. Cambridge University Press, CambridgeGoogle Scholar
  9. 9.
    Muller K, Weigmann U, Burghause H (1986) Simulation of focused ion beam milling. Microelectron Eng 5(1–4):481–489CrossRefGoogle Scholar
  10. 10.
    Osher S, Sethian J (1988) Fronts propagating with curvature-dependent speed: algorithms based on Hamilton-Jacobi formulations. J Comput Phys 79(1):12–49MathSciNetMATHCrossRefGoogle Scholar
  11. 11.
    Baranger M, Mozer B (1959) Electric field distributions in an ionized gas. Phys Rev 115(3):521–525MATHCrossRefGoogle Scholar
  12. 12.
    Gorodetski Y, Niv A, Kleiner V, Hasman E (2008) Observation of the spin-based plasmonic effect in nanoscale structures. Phys Rev Lett 101(4):43903CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Limited 2011

Authors and Affiliations

  • Xichun Luo
    • 1
  • Jining Sun
    • 1
  • James M. Ritchie
    • 1
  • Wenlong Chang
    • 1
  • Wei Wang
    • 1
  1. 1.School of Engineering and Physical SciencesHeriot-Watt University, Riccarton CampusEdinburghUK

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